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The influence of substrate temperature on the properties of aluminum-doped zinc oxide thin films deposited by DC magnetron sputteringMOON, Yeon-Keon; KIM, Se-Hyun; PARK, Jong-Wan et al.Journal of materials science. Materials in electronics. 2006, Vol 17, Num 12, pp 973-977, issn 0957-4522, 5 p.Article
