Anodic alumina as a material for MEMSDELENDIK, Kirill I; VOITIK, Olga L.SPIE proceedings series. 2001, pp 355-361, isbn 0-8194-4322-0Conference Paper

Electrochemistry and microsystemsEHRFELD, Wolfgang.Electrochimica acta. 2003, Vol 48, Num 20-22, pp 2857-2868, issn 0013-4686, 12 p.Conference Paper

A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technologyYI, F; PENG, L; ZHANG, J et al.Microsystem technologies. 2001, Vol 7, Num 3, pp 103-106, issn 0946-7076Article

Preliminary study of micromechanical stress delivery for cell biology studiesMATTEUCCI, M; LAKSHMIKANTH, T; SHIBU, K et al.Microelectronic engineering. 2007, Vol 84, Num 5-8, pp 1729-1732, issn 0167-9317, 4 p.Conference Paper

Structure mechanism of MEMS security stronglink with multi-try functionSHENGYONG LI; WENYUAN CHEN; WEIPING ZHANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 6423, pp 64235A.1-64235A.7, issn 0277-786X, isbn 978-0-8194-6536-8 0-8194-6536-4, 3Conference Paper

LiGA measurement and acceptance evaluationDEARTH, B. L; STEINHOFF, R. G.Microsystem technologies. 2003, Vol 9, Num 3, pp 197-203, issn 0946-7076, 7 p.Article

Commercialisation of LIGA : a 25-year retrospectiveSAILE, Volker.International journal of technology transfer and commercialisation. 2008, Vol 7, Num 2-3, pp 188-193, issn 1470-6075, 6 p.Conference Paper

First automated production line for X-ray-LIGA (FELIG) is brought on lineHAHN, Lothar; SCHWARTZ, Georg; SAILE, Volker et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1287-1292, issn 0946-7076, 6 p.Conference Paper

Beyond siliconDEGASPARI, John.Mechanical engineering (New York, N.Y. 1919). 2005, Vol 127, Num 7, pp 30-33, issn 0025-6501, 4 p.Article

Design rules for electroforming in the LIGA processDRESE, Klaus Stefan.Journal of the Electrochemical Society. 2004, Vol 151, Num 6, pp D39-D45, issn 0013-4651Article

Development of a micro-optical distance sensorOKA, Toru; NAKAJIMA, Hajime; TSUGAI, Masahiro et al.Sensors and actuators. A, Physical. 2003, Vol 102, Num 3, pp 261-267, issn 0924-4247, 7 p.Article

Development of lighting panel comprising light tube fabricated by LIGA processSAWA, Yoshitaka; TANAKA, Takanori; KITADANI, Takeshi et al.Microsystem technologies. 2008, Vol 14, Num 9-11, pp 1559-1565, issn 0946-7076, 7 p.Conference Paper

A compact and disposable transdermal drug delivery systemMATTEUCCI, M; CASELLA, M; BEDONI, M et al.Microelectronic engineering. 2008, Vol 85, Num 5-6, pp 1066-1073, issn 0167-9317, 8 p.Conference Paper

A modular fabrication concept for microoptical systems : Optical MEMS and its future trendsMOHR, Jürgen A; LAST, Arndt; HOLLENBACH, Uwe et al.Journal of lightwave technology. 2003, Vol 21, Num 3, pp 643-647, issn 0733-8724, 5 p.Article

Compact micropumping system based on LIGA fabricated micropartsMATTEUCCI, M; PERENNES, F; MARMIROLI, B et al.Microelectronic engineering. 2006, Vol 83, Num 4-9, pp 1288-1290, issn 0167-9317, 3 p.Conference Paper

Key issues in fabricating microstructures with high aspect ratios by using deep X-ray lithographyCHENG, Chao-Min; CHEN, Ren-Haw.Microelectronic engineering. 2004, Vol 71, Num 3-4, pp 335-342, issn 0167-9317, 8 p.Article

Large area and wide dimensions X-ray lithography using energy variable synchrotron radiationUTSUMI, Yuichi; KISHIMOTO, Takefumi; HATTORI, Tadashi et al.Microsystem technologies. 2007, Vol 13, Num 5-6, pp 417-423, issn 0946-7076, 7 p.Conference Paper

Development rate of PMMA exposed to synchrotron x-ray radiation for LIGA applicationsMCNAMARA, Shamus.Journal of micromechanics and microengineering (Print). 2011, Vol 21, Num 1, issn 0960-1317, 015002.1-015002.7Article

Manufacturing microdroplet generators with Laser-LIGA techniqueHUSNY, Joeska; JIN, Hengyi; HARVEY, Erol C et al.SPIE proceedings series. 2004, pp 100-106, isbn 0-8194-5169-X, 7 p.Conference Paper

Fabrication of three-dimensional inductor coil using excimer laser micromachiningJOLIC, K. I; GHANTASALA, M. K; HAYES, J. P et al.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 5, pp 782-789, issn 0960-1317, 8 p.Article

Fast prototyping of high-aspect ratio, high-resolution X-ray masks by gas-assisted focused ion beamKHAN MALEK, C; HARTLEY, F. T; NEOGI, J et al.Microsystem technologies. 2003, Vol 9, Num 6-7, pp 409-412, issn 0946-7076, 4 p.Article

An investigation of the effects of thickness on mechanical properties of LIGA nickel MEMS structuresLOU, J; ALLAMEH, S; BUCCHEIT, T et al.Journal of materials science. 2003, Vol 38, Num 20, pp 4129-4135, issn 0022-2461, 7 p.Conference Paper

Surface microstructuring of biocompatible bone analogue material HAPEX<^TM> using LIGA technique and embossingSCHNEIDER, Andreas; REA, Susan; HUQ, Ejaz et al.SPIE proceedings series. 2003, pp 57-64, isbn 0-8194-4976-8, 8 p.Conference Paper

Testing of a LIGA-microspectrometer for monitoring dissolved nickel concentration when etching nickel and its alloys in aqueous ferric chloride solutionsALLEN, David M; ALMOND, Heather J. A; BOUBAL, Denis et al.Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2003, pp 251-254, isbn 0-7803-7066-X, 1Vol, 4 p.Conference Paper

Numerical analysis of electrodeposition in microcavitiesHAGHDOOST, A; PITCHUMANI, R.Electrochimica acta. 2011, Vol 56, Num 24, pp 8260-8271, issn 0013-4686, 12 p.Article