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Fabrication of a micro-scale, indium-tin-oxide thin film strain-sensor by pulsed laser deposition and focused ion beam machiningMILLER, Timothy M; HUI FANG; MAGRUDER, Robert H et al.Sensors and actuators. A, Physical. 2003, Vol 104, Num 2, pp 162-170, issn 0924-4247, 9 p.Article