MESSUNG KLEINER STRICH- UND SPALTBREITEN MIT DUNKELFELDABBILDUNG IM LICHTMIKROSKOP = MESURE DES LARGEURS DE FENTES ET DE TRAITS MINCESMIRANDE W.1981; OPTIK (STUTTG.); ISSN 0030-4026; DEU; DA. 1981; VOL. 59; NO 3; PP. 197-205; ABS. ENG; BIBL. 13 REF.Article

Strukturbreitenmessung mit lichtoptischen Verfahren = Mesure de largeurs de structures par des techniques d'optique lumineuse = Measurement of structure widths by means of luminous optic techniquesMIRANDE, W.VDI-Berichte. 1987, Num 659, pp 319-330, issn 0083-5560Conference Paper

A DENSITOMETER FOR COLOR FILMSHOESCHEN D; MIRANDE W.1979; J. APPL. PHOTOGR. ENGNG; USA; DA. 1979; VOL. 5; NO 2; PP. 84-88; BIBL. 9 REF.Article

MEASUREMENT OF WIENER SPECTRA WITH A LINEAR MICRODENSITOMETERHOESCHEN D; MIRANDE W.1980; PHOTOGR. SCI. ENG.; ISSN 0031-8760; USA; DA. 1980; VOL. 24; NO 5; PP. 257-263; BIBL. 22 REF.Article

EIN MIKRODENSITOMETER MIT EINEM HE-NE-LASER ALS STRAHLUNGSQUELLE. = UN MICRODENSITOMETRE AVEC UN LASER A HE-NE COMME SOURCE DE RAYONNEMENTHOESCHEN D; MIRANDE W.1977; OPTIK; DTSCH.; DA. 1977; VOL. 48; NO 5; PP. 459-470; ABS. ANGL.; BIBL. 12 REF.Article

Messung der Modulationsübertragungsfunktion von Film-Folien-Kombinationen mit einem Bleiraster = Mesure de la fonction de transfert de modulation des associations film-écrans avec une grille au plomb = Measurement of modulation transfer functions of film-screen combinations with a lead bar patternHOESCHEN, D; MIRANDE, W.RöFo. Fortschritte auf dem Gebiete der Röntgenstrahlen und der Nuklearmedizin. 1984, Vol 140, Num 5, pp 600-604, issn 0340-1618Article

Wienerspektren von Röntgenfilm-Folien-Kombinationen = Spectre de puissance des systèmes radiologiques film-écran = Power spectra of X-ray screen-film combinationsMIRANDE, W; HOESCHEN, D.Röntgen-Blätter. 1985, Vol 38, Num 3, pp 81-84, issn 0300-8592Article

Accuracy in critical dimension measurements on integrated circuits and photomasksMIRANDE, W; GEUTHER, H; JACOBSEN, H et al.Microelectronic engineering. 1996, Vol 30, Num 1-4, pp 587-591, issn 0167-9317Conference Paper

In quest of nm accuracy : supporting optical metrology by rigorous diffraction theory and AFM topographySCHRÖDER, K.-P; MIRANDE, W; GEUTHER, H et al.Optics communications. 1995, Vol 115, Num 5-6, pp 568-575, issn 0030-4018Article

New methods for CD measurements on photomasks using dark field optical microscopyBODERMANN, Bernd; MICHAELIS, Winfried; DIENER, Alexander et al.SPIE proceedings series. 2003, pp 54-61, isbn 0-8194-5018-9, 8 p.Conference Paper

A lateral nanoscale linewidth/pitch standard for every day calibration of high-resolution microscopy techniquesHUEBNER, Uwe; BOUCHER, R; MEYER, M et al.Microelectronic engineering. 2007, Vol 84, Num 5-8, pp 1797-1800, issn 0167-9317, 4 p.Conference Paper

Calibration of test reticles for qualification of imaging properties of microlithographic projection lensesHÄSSLER-GROHNE, W; HAHM, K; MIRANDE, W et al.SPIE proceedings series. 2002, pp 142-150, isbn 0-8194-4531-2, 9 p.Conference Paper

Calibrated scanning force microscope with capabilities in the subnanometre rangeHASCHE, K; HERRMANN, K; MIRANDE, W et al.Surface and interface analysis. 2002, Vol 33, Num 2, pp 71-74, issn 0142-2421Conference Paper

Calibration standard for in-situ-determination of AFM tip-shapesHÜBNER, U; MORGENROTH, W; BORNMANN, S et al.euspen : european society for precision engineering and nanotechnology. International conference. 2001, pp 530-533, 2VolConference Paper

Intercomparison of scanning probe microscopesBREIL, R; FRIES, T; KOMTNER, R et al.Precision engineering. 2002, Vol 26, Num 3, pp 296-305, issn 0141-6359Article

Results of a round robin measurement on a new CD mask standardGANS, F; LIEBE, R; BETTIN, L et al.SPIE proceedings series. 2005, pp 122-133, isbn 0-8194-5830-9, 12 p.Conference Paper