Measurement system for full three-dimensional motion characterization of MEMSREMBE, Christian; MULLER, Richard S.Journal of microelectromechanical systems. 2002, Vol 11, Num 5, pp 479-488, issn 1057-7157, 10 p.Article

Stroboscopic interferometry for characterization and improvement of flexural plate-wave transducersREMBE, Christian; CATON, Pamela; WHITE, Richard M et al.SPIE proceedings series. 2001, pp 108-116, isbn 0-8194-4286-0Conference Paper

Stroboscopic interferometer system for dynamic MEMS characterizationHART, Matthew R; CONANT, Robert A; LAU, Kam Y et al.Journal of microelectromechanical systems. 2000, Vol 9, Num 4, pp 409-418, issn 1057-7157Article

Simple fabrication process for self-aligned, high-performance microscanners- : Demonstrated use to generate a 2-D ablation patternCHOO, Hyuck; GARMIRE, David; DEMMEL, James et al.Journal of microelectromechanical systems. 2007, Vol 16, Num 2, pp 260-268, issn 1057-7157, 9 p.Article

Poly-SiGe MEMS actuators for adaptive opticsLIN, Blake C.-Y; KING, Tsu-Jae; MULLER, Richard S et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 61130S.1-61130S.7, issn 0277-786X, isbn 0-8194-6155-5, 1VolConference Paper

Electrostatic charge and field sensors based on micromechanical resonatorsRIEHL, Patrick S; SCOTT, Karen L; MULLER, Richard S et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 5, pp 577-589, issn 1057-7157, 13 p.Article