Second-Stage Actuation for Hard Disc Drives Through MEMS TechnologyGATZEN, Hans H; FREITAS, Paulo J. P; OBERMEIER, Ernst et al.IEEE transactions on magnetics. 2010, Vol 46, Num 3, pp 782-789, issn 0018-9464, 8 p., 1Conference Paper

MEMS microdisplays : overview and marketsBOUCHIUD, Jérémie; WICHT, Henning.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 611406.1-611406.8, issn 0277-786X, isbn 0-8194-6156-3, 1VolConference Paper

MEMS components and applications for industry, automobiles, aerospace and communication II (San Jose CA, 28-29 January 2003)Janson, Siegfried W.SPIE proceedings series. 2003, isbn 0-8194-4781-1, XLIV, 248 p, isbn 0-8194-4781-1Conference Proceedings

Special Issue on Design, Test, Integration and Packaging of MEMS/MOEMS, 2011COURTOIS, Bernard; MICHEL, Bernd.Microsystem technologies. 2012, Vol 18, Num 11, issn 0946-7076, 185 p.Serial Issue

Fiber alignment analysis of a receiver with integrated MEMS VOACHAO WANG; HICKEY, Ryan; IRWIN, Rob et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 63521Q.1-63521Q.8, issn 0277-786X, isbn 0-8194-6447-3, 2VolConference Paper

MEMS / MOEMS technologies and applications II (Beijing, 10-12 November 2004)Zhichun Ma; Guofan Jin; Xuyuan Chen et al.SPIE proceedings series. 2004, isbn 0-8194-5596-2, XI, 364 p, isbn 0-8194-5596-2Conference Proceedings

Design, test, integration and packaging of MEMS/MOEMS 2003 (DTIP 2003)Bergman, Keren.Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2003, isbn 0-7803-7066-X, 1Vol, XI-411 p, isbn 0-7803-7066-XConference Proceedings

BioMEMS and smart nanostructures (Adelaide, 17-19 December 2001)Kish, Laszlo B; Harvey, Erol C; Spillman, William B et al.SPIE proceedings series. 2001, isbn 0-8194-4320-4, XI, 362 p, isbn 0-8194-4320-4Conference Proceedings

Design, test, integration and packaging of MEMS/MOEMS 2004 (DTIP 2004)Courtois, Bernard.Symposium on Design, Test, Integration and Packaging of MWMS/MOEMS. 2004, isbn 2-84813-026-1, 1 vol (XV-490 p.), isbn 2-84813-026-1Conference Proceedings

Ambient vibration study of the Gi-Lu cable-stay bridge : Application of wireless sensing unitsLU, Kung-Chun; YANG WANG; LYNCH, J. P et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 61741D.1-61741D.11, issn 0277-786X, isbn 0-8194-6227-6Conference Paper

Analytical and experimental characterization of an optical MEMS devicePRYPUTNIEWICZ, Ryszard J; FURLONG, Cosme; PRYPUTNIEWICZ, Emily J et al.SPIE proceedings series. 2003, pp 774-779, isbn 0-8194-5189-4, 6 p.Conference Paper

Controlled Thermophoresis as an Actuation Mechanism for Noncantilevered MEMS DevicesGOTSMANN, Bernd; DESPONT, Michel; DUERIG, Urs et al.Journal of microelectromechanical systems. 2008, Vol 17, Num 6, pp 1287-1293, issn 1057-7157, 7 p.Article

Materials optimization for magnetic MEMSGIBBS, Mike R. J.IEEE transactions on magnetics. 2007, Vol 43, Num 6, pp 2666-2671, issn 0018-9464, 6 p.Conference Paper

Micro-Fabricated Electromagnetic Power Generator to Scavenge Low Ambient VibrationJONG CHEOL PARK; DONG HYUN BANG; JAE YEONG PARK et al.IEEE transactions on magnetics. 2010, Vol 46, Num 6, pp 1937-1942, issn 0018-9464, 6 p.Conference Paper

EXPANDING THE SPACECRAFT APPLICATION BASE WITH MEMS GYROSBRADY, Tye.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7928, issn 0277-786X, isbn 978-0-8194-8465-9 0-8194-8465-2, 79280J.1-79280J.9Conference Paper

Micro (and Nano-) Mechanical Signal ProcessorsBHAVE, Sunil A.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7679, issn 0277-786X, isbn 978-0-8194-8143-6, 76790J.1-76790J.6Conference Paper

Lessons for nanoGRACE, Roger H.Mechanical engineering (New York, N.Y. 1919). 2008, Vol 130, Num 8, pp 24-28, issn 0025-6501, 5 p.Article

Nanotechnology and MEMS-based systems for civil infrastructure safety and security : Opportunities and challengesROBINSON, Nidia; SAAFI, Mohamed.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 61742S.1-61742S.10, issn 0277-786X, isbn 0-8194-6227-6Conference Paper

High level communication interface design for integrated MEMS and microinstrument busRODRIGUEZ, M; MAGDALENO, E; FERRER, C et al.SPIE proceedings series. 2005, pp 107-115, isbn 0-8194-5831-7, 1Vol, 9 p.Conference Paper

Micromachining and microfabrication process technology IX (San Jose CA, 27-29 January 2004)Maher, Mary Ann; Jakubczak, Jerome F.SPIE proceedings series. 2004, isbn 0-8194-5250-5, XXII, 276 p, isbn 0-8194-5250-5Conference Proceedings

17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004 technical digest)IEEE International Conference on Micro Electro Mechanical Systems. 2004, isbn 0-7803-8265-X, 1Vol, LI-868 p, isbn 0-7803-8265-XConference Proceedings

Functional 3-D PDMS microchannels having slanted grooves embedded walls realizing spiral flowSATO, Hironobu; ITO, Seiki; TAJIMA, Kenji et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 693-696, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

MEMS / MOEMS : advances in photonic communications, sensing, metrology, packaging and assembly (Brugge, 28-29 October 2002)Behringer, Uwe F.W; Courtois, Bernard; Khounsary, Ali M et al.SPIE proceedings series. 2003, isbn 0-8194-4740-4, VII, 203 p, isbn 0-8194-4740-4Conference Proceedings

A novel process for fabricating slender and compliant suspended poly-SI micro-mechanical structures with sub-micron gap spacingPAMIDIGHANTAM, S; LAUREYN, W; SALAH, A et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 661-664, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Bi-directional control systems for microfluidsJEN, Chun-Ping; LIN, Yu-Cheng.Proceedings, IEEE micro electro mechanical systems. 2002, pp 129-132, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper