kw.\*:("Micromachining")
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Generation and characterization of polymeric tridimensional microstructures for micromachine applicationMOUSINHO, A. P; MANSANO, R. D; DE ARRUDA, A. C. S et al.Microelectronics journal. 2003, Vol 34, Num 5-8, pp 651-653, issn 0959-8324, 3 p.Conference Paper
High density plasma chemical vapor deposition of diamond-like carbon filmsMOUSINHO, A. P; MANSANO, R. D; MASSI, M et al.Microelectronics journal. 2003, Vol 34, Num 5-8, pp 627-629, issn 0959-8324, 3 p.Conference Paper
Non-linear techniques for increasing harvesting energy from piezoelectric and electromagnetic micro-power-generatorsAMMAR, Yasser; BASROUR, Skandar.Symposium on Design, Test, Integration and Packaging of MWMS/MOEMS. 2006, pp 344-348, isbn 2-916187-03-0, 5 p.Conference Paper
Micro/nanofactory : Concept and state of the artBREGUET, Jean-Marc; SCHMITT, Carl; CLAVEL, Reymond et al.SPIE proceedings series. 2000, pp 1-12, isbn 0-8194-3859-6Conference Paper
Production of micro components by micro powder injection moldingLIU, Z. Y; LOH, N. H; TOR, S. B et al.Journal of materials science letters. 2001, Vol 20, Num 4, pp 307-309, issn 0261-8028Article
ACES characterization of surface micromachined microfluidic devicesPRYPUTNIEWICZ, Ryszard J; GALAMBOS, Paul; BROWN, Gordon C et al.SPIE proceedings series. 2000, pp 443-448, isbn 0-930815-62-9Conference Paper
Computational and experimental approach to study of a nanoindentation process for MEMSFURLONG, Cosme; PRYPUTNLEWICZ, Dariusz R; PRYPUTNIEWICZ, Ryszard J et al.SPIE proceedings series. 2001, pp 721-724, isbn 0-8194-4317-4Conference Paper
Microfabricated devices for bio-analysisPAL, Debiani; VENKATARAMAN, V.SPIE proceedings series. 2002, pp 514-518, isbn 0-8194-4500-2, 2VolConference Paper
Electrolyte-based on-demand and disposable microbatteryKI BANG LEE; LIWEI LIN.Journal of microelectromechanical systems. 2003, Vol 12, Num 6, pp 840-847, issn 1057-7157, 8 p.Article
Characterisation of microfluidic devicesBIEN, D. C. S; MITCHELL, S. J. N; GAMBLE, H. S et al.2002 international conference on microelectronic test structures. 2002, pp 211-215, isbn 0-7803-7464-9, 5 p.Conference Paper
A novel patterning effect during high frequency laser micro-cutting of hard ceramics for microelectronics applicationsSAVRIAMA, Guillaume; JARRY, Vincent; BARREAU, Laurent et al.Applied surface science. 2014, Vol 302, pp 163-168, issn 0169-4332, 6 p.Conference Paper
Ceramic microcomponentsCFI. Ceramic forum international. 2002, Vol 79, Num 12, pp E14-E20, issn 0173-9913, 5 p.Article
Improvement of form accuracy in hybrid machining of microstructuresLIM, H. S; SENTHIL KUMAR, A; RAHMAN, M et al.Journal of electronic materials. 2002, Vol 31, Num 10, pp 1032-1038, issn 0361-5235, 7 p.Conference Paper
Stiction in surface micromachined structuresBHATTACHARYA, Enakshi; KUANG, Jinbo; JUDY, Michael et al.SPIE proceedings series. 2002, pp 485-490, isbn 0-8194-4500-2, 2VolConference Paper
Two-DOF Micro Magnetostrictive Bending Actuator for Wobbling MotionUENO, Toshiyuki; HIGUCHI, Toshiro.IEEE transactions on magnetics. 2008, Vol 44, Num 11, pp 4078-4080, issn 0018-9464, 3 p., 2Conference Paper
Mighty mitesDAREING, Don W; THUNDAT, Thomas.Mechanical engineering (New York, N.Y. 1919). 2005, Vol 127, Num 9, pp 34-37, issn 0025-6501, 4 p.Article
Micro electron beam welding and laser machining: potentials of beam welding methods in the micro-system technologySMOLKA, G; GILLNER, A; BOSSE, L et al.Microsystem technologies. 2004, Vol 10, Num 3, pp 187-192, issn 0946-7076, 6 p.Article
Small machines, Big futureDENNY, Giles.Materials world. 2001, Vol 9, Num 4, pp 18-19, issn 0967-8638Article
Smart electronics and MEMS (Newport Beach, 5-7 March 2001)Varadan, Vijay K.SPIE proceedings series. 2001, isbn 0-8194-4020-5, VIII, 392 p, isbn 0-8194-4020-5Conference Proceedings
Microprocessor-based sliding mode controller for a micromachinePANICKER, K. S. M; AHSON, S. I; BHATIA, C. M et al.IEEE transactions on industrial electronics (1982). 1988, Vol 35, Num 3, pp 387-392, issn 0278-0046Article
Characterization of micromachined silicon rectangular waveguide at 400 GHzKIRBY, P. L; PUKALA, D; MANOHARA, H et al.IEEE microwave and wireless components letters. 2006, Vol 16, Num 6, pp 366-368, issn 1531-1309, 3 p.Article
Design and developement of Bulk Micromachined flow sensorKAL, S; MAURYA, D. K; BISWAS, K et al.SPIE proceedings series. 2002, pp 537-539, isbn 0-8194-4500-2, 2VolConference Paper
Stand der Technik und Entwicklungstrends von Mikroturbinen für die Kraft-Wärme-Kopplung = State of the art and development trends of microturbine for power heat plantsRICHARTS, Fritz.Kraftwerksstechnisches kolloquium. 2002, 2Vol, vol 2, p. 7Conference Paper
Investigation of MEMS microengines rotating at 360,000 rpmBROWN, Gordon C; PRYPUTNIEWICZ, Ryszard J.SPIE proceedings series. 2000, pp 426-431, isbn 0-930815-62-9Conference Paper
Japanese activities of micromachine and its future prospectsHIRANO, T.Microsystem technologies. 1997, Vol 3, Num 2, pp 86-89, issn 0946-7076Article