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A positional accuracy study of a micro-EDM machineALMOND, H; BHOGAL, J; ALLEN, D. M et al.SPIE proceedings series. 1999, pp 1113-1124, isbn 0-8194-3154-0, 2VolConference Paper

Improved construction method of a surface micro-machined pin-jointed actuator-tool using only two mechanical layersSAUCEDO-FLORES, Emmanuel; RUELAS, Rubén; CONTRERAS-NUNO, Alejandro et al.SPIE proceedings series. 2004, pp 248-255, isbn 0-8194-5306-4, 8 p.Conference Paper

Experimentation of an electrostatically actuated monochip micropump for drug deliveryDILHAN, M; TASSELLI, J; ESTEVE, D et al.SPIE proceedings series. 1999, pp 887-896, isbn 0-8194-3154-0, 2VolConference Paper

Fabrication of microcomponents using ultraprecision machine toolsWECK, M; FISCHER, S; VOS, M et al.Nanotechnology (Bristol. Print). 1997, Vol 8, Num 3, pp 145-148, issn 0957-4484Article

Design space of single-loop planar folded micro mechanisms with out-of-plane motionLUSK, Craig P; HOWELL, Larry L.Journal of mechanical design (1990). 2006, Vol 128, Num 5, pp 1092-1100, issn 1050-0472, 9 p.Article

Micromachined stack component for miniature thermoacoustic refrigeratorTSAI, Chialun; CHEN, Reh-Lin; CHEN, Chung-Lung et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 149-151, issn 1084-6999, isbn 0-7803-7185-2, 3 p.Conference Paper

Residual stress and fracture of thick dielectric films for power MEMS applicationsZHANG, X; CHEN, K-S; SPEARING, S. M et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 164-167, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Micromachining and microfabrication process technology XI (25 January 2006, San Jose, California, USA)Maher, Mary-Ann; Stewart, Harold D; Chiao, Jung-Chih et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6151-2, 1Vol, pagination multiple, isbn 0-8194-6151-2Conference Proceedings

Recent developments in micromilling using focused ion beam technologyTSENG, Ampere A.Journal of micromechanics and microengineering (Print). 2004, Vol 14, Num 4, pp R15-R34, issn 0960-1317Article

Microfabricated substrates for eukariotic cells adherenceVASILCO, R; MANEA, E; POPESCU, A. M et al.International Semiconductor Conference. 2004, pp 279-282, isbn 0-7803-8499-7, 4 p.Conference Paper

Fabrication of out-of-plane curved surfaces in si by utilizing rie lagCHOU, Tsung-Kuan A; NAJAFI, Khalil.Proceedings, IEEE micro electro mechanical systems. 2002, pp 145-148, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

High aspect ratio nano fluidic channels by laser-controlled fracturingHUI, Allan P; QIN, Shui-Jie; LI, Wen J et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 156-159, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

An efficient relaxation based DIPIE algorithm for computer aided design of electrostatic actuatorsBOCHOBZA-DEGANI, Ofir; ELATA, David; NEMIROVSKY, Yael et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 200-203, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Conventional micromachining for microassembly applicationsEBERHARDT, R; GEBHARDT, A; SCHELLER, T et al.SPIE proceedings series. 1999, pp 687-695, isbn 0-8194-3154-0, 2VolConference Paper

A new pattern on fabrication of fiber spinnerets by the LIGA technologyTSENG, S. C; SHI, C. T; KUO, C. L et al.SPIE proceedings series. 1999, pp 518-525, isbn 0-8194-3154-0, 2VolConference Paper

Nonsilicon micromachining for MOEMS elementsCHEN, Y.-X; ZHAO, X.-L; WANG, Z.-G et al.SPIE proceedings series. 1998, pp 263-270, isbn 0-8194-2715-2Conference Paper

Microfabricated ice-detection sensorDEANNA, R. G; MEHREGANY, M; ROY, S et al.SPIE proceedings series. 1997, pp 42-51, isbn 0-8194-2459-5Conference Paper

A direct plasma etch approach to high aspect ratio polymer micromachining with applications in biomems and CMOS-MEMSZAHN, Jeffrey D; GABRIEL, Kaigham J; FEDDER, Gary K et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 137-140, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

3D fabrication by moving mask deep X-ray lithography (M2DXL) with multiple stagesTABATA, Osamu; MATSUZUKA, Naoki; YAMAJI, Tadahiro et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 180-183, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Femtosecond lasers and their implications for materials processingCORKUM, P. B.SPIE proceedings series. 1998, pp 10-17, isbn 0-8194-2713-6Conference Paper

Batch-fabricated microjet coolers for electronic componentsLAGORCE, L; KERCHER, D; ENGLISH, J et al.SPIE proceedings series. 1997, pp 494-499, isbn 0-930815-50-5Conference Paper

Microstructures micro-usinées millimétriques : 3M = Millimetric micromachined microstructures : 3MSAINT-ETIENNE, E; GUILLON, B; PONS, P et al.Journées nationales microondes. 1997, pp 202-203, 2VolConference Paper

Fabrication of thick silicon dioxide layers using drie, oxidation and trench refillCHUNBO ZHANG; NAJAFI, Khalil.Proceedings, IEEE micro electro mechanical systems. 2002, pp 160-163, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Fabrication of high-aspect-ratio PZT thick film structure using sol-gel technique and SU-8 photoresistFUTAI, Nobuyuki; MATSUMOTO, Kiyoshi; SHIMOYAMA, Isao et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 168-171, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Addressing the needs of complex MEMS designCLARK, J. V; BINDEL, D; PISTER, K. S. J et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 204-209, issn 1084-6999, isbn 0-7803-7185-2, 6 p.Conference Paper

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