A microacoustic analysis including viscosity and thermal conductivity to model the effect of the protective cap on the acoustic response of a MEMS microphoneHOMENTCOVSCHI, D; MILES, R. N; LOEPPERT, P. V et al.Microsystem technologies. 2014, Vol 20, Num 2, pp 265-272, issn 0946-7076, 8 p.Article

A novel electrostatic based microgripper (cellgripper) integrated with contact sensor and equipped with vibrating system to release particles activelyDEMAGHSI, Hamed; MIRZAJANI, Hadi; HABIB BADRI GHAVIFEKR et al.Microsystem technologies. 2014, Vol 20, Num 12, pp 2191-2202, issn 0946-7076, 12 p.Article

A novel microneedle array for the treatment of hydrocephalusJONGHYUN OH; KEWEI LIU; MEDINA, Tim et al.Microsystem technologies. 2014, Vol 20, Num 6, pp 1169-1179, issn 0946-7076, 11 p.Article

Analytical investigation of the feasibility of sacrificial microchannel sealing for Chip-Scale Atomic MagnetometersTSUJIMOTO, Kazuya; HIRAI, Yoshikazu; SUGANO, Koji et al.Microsystem technologies. 2014, Vol 20, Num 3, pp 357-365, issn 0946-7076, 9 p.Article

CMOS integrated elliptic diaphragm capacitive pressure sensor in SiGe MEMSANANIAH DURAI SUNDARARAJAN; REZAUL HASAN, S. M.Microsystem technologies. 2014, Vol 20, Num 1, pp 145-155, issn 0946-7076, 11 p.Article

Development of reel-to-reel microchip mounting system for fabrication of meter-long LED lighting tapesTAKAMATSU, Seiichi; YAMASHITA, Takahiro; ITOH, Toshihiro et al.Microsystem technologies. 2014, Vol 20, Num 12, pp 2247-2253, issn 0946-7076, 7 p.Article

Development of the automated gold-linked electrochemical immunoassay system for blood monitoringSHIOHARA, Suguru; CHIKAE, Miyuki; UKITA, Yoshiaki et al.Microsystem technologies. 2014, Vol 20, Num 2, pp 273-279, issn 0946-7076, 7 p.Article

Effects of geometric parameters for superhydrophobicity of polymer surfaces fabricated by precision tooling machinesDONGHUI CHU; NEMOTO, Akihiro; ITO, Hiroshi et al.Microsystem technologies. 2014, Vol 20, Num 2, pp 193-200, issn 0946-7076, 8 p.Article

Fabrication of AFM probe with CuO nanowire formed by stress-induced methodHOSOI, Atsushi; KOTO, Hisataka; YANG JU et al.Microsystem technologies. 2014, Vol 20, Num 12, pp 2221-2229, issn 0946-7076, 9 p.Article

Fabrication of a MEMS capacitive accelerometer with symmetrical double-sided serpentine beam-mass structureXIAOFENG ZHOU; LUFENG CHE; YOULING LIN et al.Microsystem technologies. 2014, Vol 20, Num 7, pp 1365-1372, issn 0946-7076, 8 p.Article

Investigation of actuation voltage for non-uniform serpentine flexure design of RF-MEMS switchASHISH KUMAR SHARMA; GUPTA, Navneet.Microsystem technologies. 2014, Vol 20, Num 3, pp 413-418, issn 0946-7076, 6 p.Article

Micromachined catheter flow sensor and its applications in breathing measurements in animal experimentsSHIKIDA, Mitsuhiro; SHIKANO, Takaaki; MATSUYAMA, Takuya et al.Microsystem technologies. 2014, Vol 20, Num 3, pp 505-513, issn 0946-7076, 9 p.Article

Packaging of a 3-axial piezoresistive force sensor with backside contactsKARPATI, T; KULINYI, S; VEGVARI, R et al.Microsystem technologies. 2014, Vol 20, Num 6, pp 1063-1068, issn 0946-7076, 6 p.Article

Patterning of burnishing head for hard disk platters by synchrotron radiation lithographyLEKSAKUL, Komgrit; MANEEKAT, Chalinee; PHATTHANAKUN, Rungrueang et al.Microsystem technologies. 2014, Vol 20, Num 12, pp 2203-2211, issn 0946-7076, 9 p.Article

Rapid prototyping of magnetic valve based on nanocomposite Co/PDMS membraneSINGH, Akanksha; HIRSINGER, Laurent; DELOBELLE, Patrick et al.Microsystem technologies. 2014, Vol 20, Num 3, pp 427-436, issn 0946-7076, 10 p.Article

Size effect on mechanical properties of TiO₂ capped nanotubes investigated using in situ transmission electron microscopyKANG, Shao-Hui; FANG, Te-Hua; CHEN, Tao-Hsing et al.Microsystem technologies. 2014, Vol 20, Num 3, pp 515-520, issn 0946-7076, 6 p.Article

Verifying finite element simulation in miniature silicon based stacked diaphragm pressure sensorsSUJA, K. J; KOMARAGIRI, Rama.Microsystem technologies. 2014, Vol 20, Num 12, pp 2277-2285, issn 0946-7076, 9 p.Article

2^N Period submicron grating at the inner wall of a metal cylinderHIRSHY, H; SCHOLZ, S. G; JOURLIN, Y et al.Microsystem technologies. 2014, Vol 20, Num 10-11, pp 1833-1837, issn 0946-7076, 5 p.Conference Paper

3D nanometer features by ultra precision machiningHASKIC, Kurt; KÜHNE, Stefan; LÖCHEL, Bernd et al.Microsystem technologies. 2014, Vol 20, Num 10-11, pp 2051-2053, issn 0946-7076, 3 p.Conference Paper

Electrical characterization of micromachined AlN resonators at various back pressuresABABNEH, Abdallah; AL-OMARI, A. N; SCHMID, U et al.Microsystem technologies. 2014, Vol 20, Num 4-5, pp 663-670, issn 0946-7076, 8 p.Conference Paper

Energy storage options for wireless sensors powered by aircraft specific thermoelectric energy harvesterTHANGARAJ, K; ELEFSINIOTS, A; BECKER, Th et al.Microsystem technologies. 2014, Vol 20, Num 4-5, pp 701-707, issn 0946-7076, 7 p.Conference Paper

Fabrication of micro pore optics with smooth sidewall using X-ray lithographyTIANCHONG ZHANG; FUTING YI; BO WANG et al.Microsystem technologies. 2014, Vol 20, Num 10-11, pp 2005-2010, issn 0946-7076, 6 p.Conference Paper

High-aspect-ratio nanoimprinted structures for a multi-pole magnetic scaleXU, Zhi-Hao; WU, Chien-Li; SUNG, Cheng-Kuo et al.Microsystem technologies. 2014, Vol 20, Num 10-11, pp 1949-1953, issn 0946-7076, 5 p.Conference Paper

Investigation of demagnetization during light sliding contactYULIANG LIU; JUN HE; JIA LOU et al.Microsystem technologies. 2014, Vol 20, Num 8-9, pp 1541-1548, issn 0946-7076, 8 p.Conference Paper

Magnetic equilibrium postures of a multibody magnetic microrobot composed of a spherical magnet chainSEUNGMUN JEON; GUNHEE JANG; JAEKWANG NAM et al.Microsystem technologies. 2014, Vol 20, Num 8-9, pp 1471-1478, issn 0946-7076, 8 p.Conference Paper