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Werkzeuge zur Fertigung und Handhabung in der Mikrotechnik: Herstellung von Mikrosystemen = Tools for manufacturing and handling in the microtechnicKREIS, Willibald; GAYK, Karsten.VDI-Z. 2003, Vol 145, Num 7-8, pp 62-65, issn 0042-1766, 4 p.Article

Micromachined microsensors for manufacturingGAO, Robert; LI ZHANG.IEEE instrumentation & measurement magazine. 2004, Vol 7, Num 2, pp 20-26, issn 1094-6969, 7 p.Article

Lasers carve precision microscale featuresLERNER, E. J.Laser focus world. 1999, Vol 35, Num 9, pp 87-91, issn 1043-8092, 4 p.Article

Spark Erosion for fabrication of micromechanical components : Evaluation of possibilities and limitsHERBST, P; POPOVIC, G; DETTER, H et al.International conference on microelectronic. 1997, pp 539-542, isbn 0-7803-3664-X, 2VolConference Paper

Femtosecond laser micromachining with extended depth of focus by using diffractive lensesTORRES-PEIRO, S; GONZALEZ-AUSEJO, J; MENDOZA-YERO, O et al.Applied surface science. 2014, Vol 303, pp 393-398, issn 0169-4332, 6 p.Article

A positional accuracy study of a micro-EDM machineALMOND, H; BHOGAL, J; ALLEN, D. M et al.SPIE proceedings series. 1999, pp 1113-1124, isbn 0-8194-3154-0, 2VolConference Paper

Micro-usinage des matériaux monocristallins = Monocrystalline material micromachiningDANEL, Jean-Sébastien.Techniques de l'ingénieur. Génie mécanique. 1998, Vol BT2, Num BM7290, pp BM7290.1-BM7290.18, issn 1762-8768Article

Laser microstructuring for fabricating superhydrophobic polymeric surfacesCARDOSO, M. R; TRIBUZI, V; BALOGH, D. T et al.Applied surface science. 2011, Vol 257, Num 8, pp 3281-3284, issn 0169-4332, 4 p.Article

Improved construction method of a surface micro-machined pin-jointed actuator-tool using only two mechanical layersSAUCEDO-FLORES, Emmanuel; RUELAS, Rubén; CONTRERAS-NUNO, Alejandro et al.SPIE proceedings series. 2004, pp 248-255, isbn 0-8194-5306-4, 8 p.Conference Paper

A novel 3D process for single-crystal silicon micro-probe structuresPARK, Sangjun; KIM, Bonghwan; KIM, Jongpal et al.Journal of micromechanics and microengineering (Print). 2002, Vol 12, Num 5, pp 650-654, issn 0960-1317Article

Combining the best of bulk and surface micromachining using Si {111} substratesFLEMING, J. G.SPIE proceedings series. 1998, pp 162-168, isbn 0-8194-2970-8Conference Paper

Micromachining and microfabrication process technology IX (San Jose CA, 27-29 January 2004)Maher, Mary Ann; Jakubczak, Jerome F.SPIE proceedings series. 2004, isbn 0-8194-5250-5, XXII, 276 p, isbn 0-8194-5250-5Conference Proceedings

Experimentation of an electrostatically actuated monochip micropump for drug deliveryDILHAN, M; TASSELLI, J; ESTEVE, D et al.SPIE proceedings series. 1999, pp 887-896, isbn 0-8194-3154-0, 2VolConference Paper

Micromachining for silicon microaccelerometerBHAT, K. N.SPIE proceedings series. 1998, pp 262-273, isbn 0-8194-2762-4Conference Paper

MICROMACHINING WITH YAG LASERS.WASKO JH.1975; CHICAGO; INDUSTRIAL AND SCIENTIFIC CONFERENCE MANAGEMENT; DA. 1975; PP. 821-822Conference Proceedings

Fabrication of microcomponents using ultraprecision machine toolsWECK, M; FISCHER, S; VOS, M et al.Nanotechnology (Bristol. Print). 1997, Vol 8, Num 3, pp 145-148, issn 0957-4484Article

Joint Tokyo-Warwick Biennial Nanotechnology SymposiumDAVIES, S. T; MIYAMOTO, I.Nanotechnology (Bristol. Print). 1998, Vol 9, Num 2, issn 0957-4484, 96 p.Conference Proceedings

Micromachined microdevices and microinstrumentsMACDONALD, N. C; ADAMS, S. G; MIHAILOVICH, R. E et al.Microelectronic engineering. 1996, Vol 30, Num 1-4, pp 563-564, issn 0167-9317Conference Paper

Fabrication of micro torsional actuator using surface plus bulk micromachining processesHSIEH, J; WEILEUN FANG.SPIE proceedings series. 1998, pp 368-376, isbn 0-8194-2973-2Conference Paper

Design space of single-loop planar folded micro mechanisms with out-of-plane motionLUSK, Craig P; HOWELL, Larry L.Journal of mechanical design (1990). 2006, Vol 128, Num 5, pp 1092-1100, issn 1050-0472, 9 p.Article

Applications and simulation of unconventional bulk-micromachining using underetching of {100} silicon planesSCHRÖPFER, G; DE LABACHELERIE, M; TELLIER, C. R et al.Microsystem technologies. 1999, Vol 5, Num 4, pp 194-199, issn 0946-7076Article

Optical fibre switches based on full wafer silicon micromachiningHOFFMANN, M; KOPKA, P; GROSS, T et al.Journal of micromechanics and microengineering (Print). 1999, Vol 9, Num 2, pp 151-155, issn 0960-1317Conference Paper

Fibre-optical MEMS switches based on bulk silicon micromachiningHOFFMANN, M; KOPKA, P; NÜSSE, D et al.Microsystem technologies. 2003, Vol 9, Num 5, pp 299-303, issn 0946-7076, 5 p.Conference Paper

Study on the application of silicide in surface micromachiningZHIHONG LI; GUOBING ZHANG; WEI WANG et al.Journal of micromechanics and microengineering (Print). 2002, Vol 12, Num 2, pp 162-167, issn 0960-1317Article

Release and surface-passivation techniques of stiction-free ndcromachined structuresHARIZ, Alex J.SPIE proceedings series. 2002, pp 272-278, isbn 0-8194-4730-7, 7 p.Conference Paper

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