Simultaneous mapping of out-of-plane and in-plane vibrations of MEMS with (sub)nanometer resolutionPETITGRAND, Sylvain; BOSSEBOEUF, Alain.Journal of micromechanics and microengineering (Print). 2004, Vol 14, Num 9, pp S97-S101, issn 0960-1317Conference Paper

Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trendsBOSSEBOEUF, Alain; PETITGRAND, Sylvain.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 4, pp S23-S33, issn 0960-1317Conference Paper

Characterization of static and dynamic optical actuation of Al microbeams by microscopic interferometry techniquesPETITGRAND, Sylvain; COURBET, Bérenger; BOSSEBOEUF, Alain et al.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 4, pp S113-S118, issn 0960-1317Conference Paper

Application of the vortex transform to microscopic interferometryPETITGRAND, Sylvain; BOSSEBOEUF, Alain; GUIRARDEL, Matthieu et al.SPIE proceedings series. 2004, pp 9-15, isbn 0-8194-5380-3, 7 p.Conference Paper

Automated fringe-pattern extrapolation for patterned surface profiling by interference microscopy with Fourier transform analysisBRELUZEAU, Cédric; BOSSEBOEUF, Alain; PETITGRAND, Sylvain et al.Proceedings of SPIE. 2005, pp 58580B.1-58580B.12, isbn 0-8194-5858-9, 1VolConference Paper