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GETTERING RATES OF VARIOUS FAST-DIFFUSING METAL IMPURITIES AT ION-DAMAGED LAYERS ON SILICONBUCK TM; PICKAR KA; POATE JM et al.1972; APPL. PHYS. LETTERS; U.S.A.; DA. 1972; VOL. 21; NO 10; PP. 485-487; BIBL. 15 REF.Serial Issue