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Negative ion based neutral beam injectionHEMSWORTH, R. S.Nuclear fusion. 2006, Vol 46, Num 6, issn 0029-5515, 190 p.Serial Issue

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Integrated high-voltage modulator for plasma immersion ion implantation with an RF plasmaROGOZIN, A. I; ASTRELIN, V. T; RICHTER, E et al.Plasma sources science & technology (Print). 2003, Vol 12, Num 3, pp 495-499, issn 0963-0252, 5 p.Article

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Particulate growth in a 13.56 MHz radiofrequency methane plasma : influence of the flow rate and the incident rf powerGERAUD-GRENIER, I; MASSEREAU-GUILBAUD, V; PLAIN, A et al.EPJ. Applied physics (Print). 2001, Vol 14, Num 3, pp 187-192, issn 1286-0042Article

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