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kw.\*:("Polissage chimique")

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Optimizing wafer polishing through phenomenological modelingRUNNELS, S. R; OLAVSON, T.Journal of the Electrochemical Society. 1995, Vol 142, Num 6, pp 2032-2036, issn 0013-4651Article

Mechanism of Ge2Sb2Te5 chemical mechanical polishingLIANGYONG WANG; ZHITANG SONG; MIN ZHONG et al.Applied surface science. 2012, Vol 258, Num 12, pp 5185-5190, issn 0169-4332, 6 p.Article

BREVET 2.137.296 (B) (7117922). A 18 MAI 1971. PROCEDE CHIMIQUE DE POLISSAGE D'ALLIAGES D'OR OU D'ARGENT UTILISES EN BIJOUTERIEsdPatent

PICKLING AND ACID DIPPINGHALL N.1976; METAL FINISHG, GUIDEBOOK DIRECT.; U.S.A.; DA. 1976; PP. 146-158 (10 P.)Article

POLISSAGE PAR ATTAQUE CHIMIQUE DU GERMANIUM PAR L'IODE GAZEUXGRIGOR'EV VE; MALKIN GM.1974; IZVEST. AKAD. NAUK S.S.S.R., NEORG. MATER.; S.S.S.R.; DA. 1974; VOL. 10; NO 8; PP. 1379-1383; BIBL. 5 REF.Article

HERSTELLUNG VON MIKROSCHLIFFEN DURCH CHEMISCHES POLIEREN = PREPARATION D'ECHANTILLONS METALLOGRAPHIQUES PAR POLISSAGE CHIMIQUEGRAMZOW B; HEIM C.1973; METALLVERARBEITUNG; DTSCH.; DA. 1973; VOL. 27; NO 2; PP. 33-34Serial Issue

BREVET 2.127.408 (B) (7107746). A 5 MARS 1971. PERFECTIONNEMENT AUX PROCEDES ET DISPOSITIFS DE FINITION MECANO-CHIMIQUE DES PIECES FACONNEESsdPatent

Particles detection and analysis of hard disk substrate after cleaning of post chemical mechanical polishingYATING HUANG; XINCHUN LU; GUOSHUN PAN et al.Applied surface science. 2009, Vol 255, Num 22, pp 9100-9104, issn 0169-4332, 5 p.Article

Characterization of slurries used for chemical-mechanical polishing (CMP) in the semiconductor industryKUNTZSCH, Timo; WITNIK, Ulrike; HOLLATZ, Mark et al.Chemical engineering & technology. 2003, Vol 26, Num 12, pp 1235-1239, issn 0930-7516, 5 p.Article

Dishing effects during chemical mechanical polishing of copper in acidic mediaLUO, Q; BABU, S. V.Journal of the Electrochemical Society. 2000, Vol 147, Num 12, pp 4639-4644, issn 0013-4651Article

Modeling the effects of particle deformation in chemical mechanical polishingXIAOCHUN CHEN; YONGWU ZHAO; YONGGUANG WANG et al.Applied surface science. 2012, Vol 258, Num 22, pp 8469-8474, issn 0169-4332, 6 p.Article

Batch sequencing for run-to-run control : Application to chemical mechanical polishingCHEN, Yih-Hang; SU, An-Jhih; SHIU, Sheng-Jyh et al.Industrial & engineering chemistry research. 2005, Vol 44, Num 13, pp 4676-4686, issn 0888-5885, 11 p.Article

New nontoxic chemical polishing baths for aluminium = Nouveaux bains de polissage chimique non toxique de l'aluminiumTAJIMA, S.Plating and surface finishing. 1985, Vol 72, Num 6, pp 64-67, issn 0360-3164Article

Augmentation de la résistance électrique d'électrodes de verreCHISTYAKOV, V. P; GERSHTANSKAYA, O. S; REUTSKIKH, V. I et al.Steklo i keramika. 1984, Num 10, pp 10-11, issn 0131-9582Article

The influence of feature-scale surface geometry on CMP processesYAO, C.-H; FEKE, D. L; ROBINSON, K. M et al.Journal of the Electrochemical Society. 2000, Vol 147, Num 8, pp 3094-3099, issn 0013-4651Article

Abrasive-free polishing for copper damascene interconnectionKONDO, Seiichi; SAKUMA, Noriyuki; HOMMA, Yoshio et al.Journal of the Electrochemical Society. 2000, Vol 147, Num 10, pp 3907-3913, issn 0013-4651Article

Dynamic mechanisms of chemical mechanical polishing based on frictional characteristicsHOMMA, Yoshio.Japanese journal of tribology. 2006, Vol 51, Num 4, pp 411-419, issn 1045-7828, 9 p.Article

MECHANO-CHEMICAL POLISHING OF MN-ZN FERRITE SINGLE CRYSTALSWATANABE J.1974; BULL. JAP. SOC. PRECIS ENGNG; JAP.; DA. 1974; VOL. 8; NO 4; PP. 155-156Article

DEVELOPMENTS IN METAL-FINISHING PLANT. = PERFECTIONNEMENTS DES INSTALLATIONS DE FINITION DES METAUXBLABY T.1977; SHEET METAL INDUSTR.; G.B.; DA. 1977; VOL. 54; NO 12; PP. 1208-1212 (3P.)Article

NOUVEAU PROCEDE DE POLISSAGE CHIMIQUE DE L'ALUMINIUM ET DE SES ALLIAGESKOKAI R; KRANSNYANSZKY J.1977; MAGYAR. ALUMIN.; MAGYAR.; DA. 1977; VOL. 14; NO 9; PP. 269; ABS. ANGL.Article

PREPARATION AND CHARACTERIZATION OF TELLURIUM SURFACES.EL AZAB; MCLAUGHIN CR; CHAMPNESS CH et al.1975; J. CRYST. GROWTH; NETHERL.; DA. 1975; VOL. 28; NO 1; PP. 1-7; BIBL. 19 REF.Article

GLANZEFFEKTE AUF METALLOBERFLAECHE DURCH CHEMISCHES GLAENZEN = EFFET DE BRILLANTAGE SUR LES SURFACES METALLIQUES PAR LE POLLISSAGE CHIMIQUEREINSCH HH.1975; OBERFLAECHE-SURF.; SCHWEIZ.; DA. 1975; VOL. 16; NO 11; PP. 248-249; ABS. FRArticle

SURFACE FINISHING OF ALKALI HALIDES.DAVISSON JW.1974; J. MATER. SCI.; G.B.; DA. 1974; VOL. 9; NO 10; PP. 1701-1704; BIBL. 4 REF.Article

BREVET PROCEDE DE DECAPAGE-BRILLANTAGE POUR LE CUIVRE ET SES ALLIAGES1978; ; FRA; DA. 1978-12-29; FR/A1/2.388.898; DEP.77-12730/1977-04-27Patent

BRILLANTATURA CHIMICA DELL' ALLUMINIO ESPERIENZA DI UNA AZIENDA = POLISSAGE CHIMIQUE DE L'ALUMINIUM. EXPERIENCE INDUSTRIELLE1976; TRATTAMENTI E FINIT.; ITAL.; DA. 1976; VOL. 16; NO 3; PP. 13-18 (3 P.)Article

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