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A sem-image processing method for recognition and fast location of IC registration marksRAJA, N. K. L; RANGRA, K. J.Microelectronic engineering. 1990, Vol 11, Num 1-4, pp 681-685, issn 0167-9317Conference Paper

Resist debris formation in electron beam lithographyDESHMUKH, P. R; RANGRA, K. J; WADHAWAN, O. P et al.Vacuum. 1999, Vol 52, Num 4, pp 469-476, issn 0042-207XArticle

Online exposure dose correction during electron beam pattern delineation by blanking pulse width modulationRAJA, N. K. L; RANGRA, K. J; SINGH, M et al.Microelectronic engineering. 1990, Vol 11, Num 1-4, pp 371-374, issn 0167-9317Conference Paper

SEM-voltage contrast as a tool for measurement of circuit parasiticsRANGRA, K. J; RAJA, N. K. L; KARKARE, V. G et al.Microelectronic engineering. 1990, Vol 11, Num 1-4, pp 367-370, issn 0167-9317Conference Paper

Micromachining of single crystal silicon in Fluorine based reactive plasma for the fabrication of high density nano-tip field-emitter arraysPANT, B. D; DESHMUKH, P. R; RANGRA, K. J et al.SPIE proceedings series. 2002, pp 1344-1347, isbn 0-8194-4500-2, 2VolConference Paper

Phenomenon of resist debris formation in electron beam lithography and its possible applicationDESHMUKH, P. R; RANGRA, K. J; SINGH, M et al.Vacuum. 1996, Vol 47, Num 11, pp 1305-1311, issn 0042-207XConference Paper

Micromachined low actuation voltage RF mems capacitive switches, technology and characterizationRANGRA, K. J; GIACOMOZZI, F; MARGESIN, B et al.International Semiconductor Conference. 2004, pp 165-168, isbn 0-7803-8499-7, 4 p.Conference Paper

Proximity exposure compensation and resit debris formation in electron beam lithographyDESHMUKH, P. R; SINGH, M; RANGRA, K. J et al.Journal of vacuum science and technology. B. Microelectronics processing and phenomena. 1992, Vol 10, Num 1, pp 179-182, issn 0734-211XConference Paper

Design of novel compact anti-stiction and low insertion loss RF MEMS switchBANSAL, Deepak; KUMAR, Amit; SHARMA, Akshdeep et al.Microsystem technologies. 2014, Vol 20, Num 2, pp 337-340, issn 0946-7076, 4 p.Article

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