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NanoMEMS systems on chipDE LOS SANTOS, Héctor J.Proceedings - Electrochemical Society. 2004, pp 83-94, issn 0161-6374, isbn 1-56677-416-0, 12 p.Conference Paper

An improved model for the triangular SOI misalignment test structureGIACOMINI, Renato; MARTINO, Joao Antonio.Proceedings - Electrochemical Society. 2004, pp 57-62, issn 0161-6374, isbn 1-56677-416-0, 6 p.Conference Paper

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