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Results 1 to 25 of 699

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An integrated self-masking technique for providing low-loss metallized RF MEMS devices in a polysilicon only MEMS processWILSON, John M; BASHIRULLAH, Rizwan; NACKASHI, David P et al.SPIE proceedings series. 2005, pp 138-152, isbn 0-8194-5831-7, 1Vol, 15 p.Conference Paper

Reliability study of AlTi / TiW, polysilicon and ohmic contacts for piezoresistive pressure sensors applicationsANDREI, A; MALHAIRE, C; BRIDA, S et al.IEEE Sensors conference. 2004, isbn 0-7803-8692-2, 3Vol, vol 3, 1125-1128Conference Paper

Effect of polysilicon interface on stress in multi-stacked polysilicon filmsCHANG AUCK CHOI; CHANG SEUNG LEE; WON ICK JANG et al.SPIE proceedings series. 1999, pp 1134-1140, isbn 0-8194-3154-0, 2VolConference Paper

MEMS with integrated CMOS read-out circuit based on sub- micrometric cantilevers array for multiple sensingVILLARROYA, Maria; VERD, Jaume; TEVA, Jordi et al.SPIE proceedings series. 2005, pp 78-85, isbn 0-8194-5831-7, 1Vol, 8 p.Conference Paper

Study of polycrystaline porous silicon field emitterWANG, W; JIN, C; JIANG, J et al.SPIE proceedings series. 1998, pp 149-151, isbn 0-8194-3021-8Conference Paper

Poly-silicon thin film transistor technology and pplications in displays and other novel technology areas (Santa Clara CA, 21-22 January 2003)Voutsas, Apostolos T.SPIE proceedings series. 2003, isbn 0-8194-4804-4, VII, 196 p, isbn 0-8194-4804-4Conference Proceedings

Rotating Out-of-Plane MicromirrorOAK, Sahil; EDMISTON, Greg; SIVAKUMAR, Ganapathy et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7594, issn 0277-786X, isbn 978-0-8194-7990-7 0-8194-7990-X, 1Vol, 75940H.1-75940H.4Conference Paper

Low-impedance thin-film polycrystalline silicon microelectrodes for extracellular stimulation and recordingBUCHER, V; GRAF, M; STELZLE, M et al.Biosensors & bioelectronics. 1999, Vol 14, Num 7, pp 639-649, issn 0956-5663Article

Physical structure of light-emitting porous polycrystalline silicon thin filmsHAN, P. G; WONG, H; POON, M. C et al.Microelectronics and reliability. 1999, Vol 39, Num 4, pp 457-462, issn 0026-2714Article

Erbium-doped silicon light emitting devicesCHEN, T. D; AGARWAL, A. M; MICHEL, J et al.SPIE proceedings series. 1998, pp 136-145, isbn 0-8194-2718-7Conference Paper

Uncertainty Analysis of Microresonator Using Classical and Interval MethodsVASUKI, B; UMAPATHY, M; UMA, G et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 652812.1-652812.4, issn 0277-786X, isbn 978-0-8194-6649-5Conference Paper

Critical processing issues for micromachined sacrificial layer etching and sealingBERNEY, H; KEMNA, A; HILL, M et al.Sensors and actuators. A, Physical. 1999, Vol 76, Num 1-3, pp 356-364, issn 0924-4247Conference Paper

SiGe BiCMOS manufacturing platform for mmWave applicationsKAR-ROY, Arjun; HOWARD, David; PREISLER, Edward et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7837, issn 0277-786X, isbn 978-0-8194-8355-3, 783707.1-783707.15Conference Paper

Modeling and characterization of sacrificial polysilicon etching using vapor-phase xenon difluorideBRAZZLE, John D; DOKMECI, Mehmet R; MASTRANGELO, Carlos H et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 737-740, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

Polysilicon process development for fully integrated surface-micromachined accelerometer with CMOS electronicsKING, D. O; WARD, M. C. L; BRUNSON, K. M et al.Sensors and actuators. A, Physical. 1998, Vol 68, Num 1-3, pp 238-243, issn 0924-4247Conference Paper

Vertically driven microactuators by electrothermal buckling effectsLIWEI LIN; LIN, S.-H.Sensors and actuators. A, Physical. 1998, Vol 71, Num 1-2, pp 35-39, issn 0924-4247Conference Paper

Design of Integrated LOCOS Waveguide Photodetector on SOILOGAN, D; KNIGHTS, A. P; JESSOP, P. E et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 68981J.1-68981J.10, issn 0277-786X, isbn 978-0-8194-7073-7, 1VolConference Paper

Realization of a ROIC for 72x4 PV-IR detectorsKAYAHAN, Huseyin; ERGINTAV, Arzu; CEYLAN, Omer et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, pp 68900F.1-68900F.10, issn 0277-786X, isbn 978-0-8194-7065-2, 1VolConference Paper

Ultra-high resolution Raman imaging by optically trapped dielectric microsphereSHEN, Z. X; KASIM, Johnson.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7033, pp 70330E.1-70330E.7, issn 0277-786X, isbn 978-0-8194-7253-3 0-8194-7253-0Conference Paper

Optimal actuation of micro-cantilevers by laser radiation pressurePAL, S; GHOSH, A. K.Electronics Letters. 2006, Vol 42, Num 10, pp 580-581, issn 0013-5194, 2 p.Article

Suspended-Gate Thin Film Transistor as highly sensitive humidity sensorSALAÜN, A-C; KOTB, H. M; MOHAMMED-BRAHIM, T et al.SPIE proceedings series. 2005, pp 231-238, isbn 0-8194-5831-7, 1Vol, 8 p.Conference Paper

A vertically-supported two-axial torsional micromirrorKI BANG LEE; LIWEI LIN.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 41-44, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

Realization of vertical P+ wall through-waferSANCHEZ, J-L; SCHEID, E; AUSTIN, P et al.SPIE proceedings series. 2004, pp 119-127, isbn 0-8194-5250-5, 9 p.Conference Paper

Modeling of angular-rate bandwidth for a vibrating microgyroscopeHONG, Y; KIM, S; LEE, J. H et al.Microsystem technologies. 2003, Vol 9, Num 6-7, pp 441-448, issn 0946-7076, 8 p.Article

Computer simulation for morphology, size, and density of oxide precipitates in CZ siliconSUEOKA, Koji; AKATSUKA, Masanori; OKUI, Masahiko et al.Journal of the Electrochemical Society. 2003, Vol 150, Num 8, pp G469-G475, issn 0013-4651Article

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