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ti.\*:("Smart electronics and MEMS (San Diego CA, 4-6 March 1997)")

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Smart electronics and MEMS (San Diego CA, 4-6 March 1997)Varadan, Vijay K; McWhorter, Paul J.SPIE proceedings series. 1997, isbn 0-8194-2459-5, IX, 350 p, isbn 0-8194-2459-5Conference Proceedings

Application of PZT thin films in microelectromechanical systemsPOLLA, D. L.SPIE proceedings series. 1997, pp 24-27, isbn 0-8194-2459-5Conference Paper

High G MEMS integrated accelerometerDAVIES, B. R; BARRON, C. C; MONTAGUE, S et al.SPIE proceedings series. 1997, pp 52-62, isbn 0-8194-2459-5Conference Paper

Smarter vehiclesBORRONI-BIRD, C. E.SPIE proceedings series. 1997, pp 2-22, isbn 0-8194-2459-5Conference Paper

Study on the resonant frequencies of an elliptical microstrip antennaMYTHILI, P; DAS, A.SPIE proceedings series. 1997, pp 322-327, isbn 0-8194-2459-5Conference Paper

Surface acoustic wave microsensors and applicationsGALIPEAU, D. W; STORY, P. R; VETELINO, K. A et al.SPIE proceedings series. 1997, pp 198-208, isbn 0-8194-2459-5Conference Paper

Wireless remotely readable microaccelerometerSUBRAMANIAN, H; VARADAN, V; VARADAN, V. K et al.SPIE proceedings series. 1997, pp 220-228, isbn 0-8194-2459-5Conference Paper

Integration of LIGA structures with CMOS circuitrySTADLER, S; AJMERA, P. K.SPIE proceedings series. 1997, pp 230-241, isbn 0-8194-2459-5Conference Paper

Microfabricated ice-detection sensorDEANNA, R. G; MEHREGANY, M; ROY, S et al.SPIE proceedings series. 1997, pp 42-51, isbn 0-8194-2459-5Conference Paper

Measurement and calibration of dynamic performance of piezoelectric micromotorZENG, Z; YANG, M; YANG, X et al.SPIE proceedings series. 1997, pp 310-315, isbn 0-8194-2459-5Conference Paper

Micromachined pressure sensors : Review and recent developmentsEATON, W. P; SMITH, J. H.SPIE proceedings series. 1997, pp 30-41, isbn 0-8194-2459-5Conference Paper

ASIC chips and their integration to smart devicesRAMALINGAM, N; VARADAN, V. K; VARADAN, V. V et al.SPIE proceedings series. 1997, pp 260-272, isbn 0-8194-2459-5Conference Paper

Integrated force array : Interface to external systemsBOBBIO, S. M; SMITH, S. W; GOODWIN-JOHANSSON, S et al.SPIE proceedings series. 1997, pp 248-259, isbn 0-8194-2459-5Conference Paper

Critical issues for the application of integrated MEMS/CMOS technologies to inertial measurement unitsSMITH, J. H; MONTAGUE, S; ALLEN, J. J et al.SPIE proceedings series. 1997, pp 242-247, isbn 0-8194-2459-5Conference Paper

Design and testing of an active polyvinylidene fluoride aperture antennaWASHINGTON, G.SPIE proceedings series. 1997, pp 106-111, isbn 0-8194-2459-5Conference Paper

An overview of micromachined platforms for thermal sensing and gas detectionMANGINELL, R. P; SMITH, J. H; RICCO, A. J et al.SPIE proceedings series. 1997, pp 273-284, isbn 0-8194-2459-5Conference Paper

Micro actuator fabricated by powder particle assemblage using microprobe technologyKONNO, T; EGASHIRA, M; SHINYA, N et al.SPIE proceedings series. 1997, pp 64-69, isbn 0-8194-2459-5Conference Paper

Microstrip antennas for wireless communication in smart structures and active dampingKHORRAMI, F; DAS, N; NOURBAKHSH, S et al.SPIE proceedings series. 1997, pp 84-93, isbn 0-8194-2459-5Conference Paper

Anodic bonding technique for silicon-to-ITO coated glass bondingCHOI, W.-B; JU, B.-K; LEE, Y.-H et al.SPIE proceedings series. 1997, pp 336-341, isbn 0-8194-2459-5Conference Paper

Forging solid-state microactuators through the merging of smart material and microelectromechanical systemsPOKINES, B; GARCIA, E.SPIE proceedings series. 1997, pp 137-147, isbn 0-8194-2459-5Conference Paper

Design and implementation of digital controllers for smart structures using field programmable gate arraysKELLY, J. S; BOWMAN, H. C; RAO, V. S et al.SPIE proceedings series. 1997, pp 298-309, isbn 0-8194-2459-5Conference Paper

Fabrication of IC-compatible capacitive sensors by polymer processingPEDERSEN, M; OLTHUIS, W; BERGVELD, P et al.SPIE proceedings series. 1997, pp 70-81, isbn 0-8194-2459-5Conference Paper

High-performance low-cost electronics for switched-capacitance devicesGANDELLI, A; OTTOBONI, R.SPIE proceedings series. 1997, pp 114-123, isbn 0-8194-2459-5Conference Paper

Low-cost patterning and etching systems for production of microelectronic modulesJAIN, K; DUNN, T. J.SPIE proceedings series. 1997, pp 316-320, isbn 0-8194-2459-5Conference Paper

Modified low-temperature direct bonding method for vacuum microelectronics applicationJU, B.-K; LEE, D.-J; CHOI, W.-B et al.SPIE proceedings series. 1997, pp 342-348, isbn 0-8194-2459-5Conference Paper

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