Surface engineering for reliable operation of MEMS devicesMABOUDIAN, Roya; CARRARO, Carlo.Journal of adhesion science and technology. 2003, Vol 17, Num 4, pp 583-591, issn 0169-4243, 9 p.Article

An investigation of sidewall adhesion in MEMSASHURST, W. Robert; DE BOER, M. P; CARRARO, C et al.Applied surface science. 2003, Vol 212-13, pp 735-741, issn 0169-4332, 7 p.Conference Paper

Adhesion and friction forces in microelectromechanical systems: mechanisms, measurement, surface modification techniques, and adhesion theoryKOMVOPOULOS, K.Journal of adhesion science and technology. 2003, Vol 17, Num 4, pp 477-517, issn 0169-4243, 41 p.Article

Pulsed laser repair of adhered surface-micromachined polycrystalline silicon cantileversPHINNEY, Leslie M; ROGERS, James W.Journal of adhesion science and technology. 2003, Vol 17, Num 4, pp 603-622, issn 0169-4243, 20 p.Article

Orthogonally-oriented nanotube arrays : TheorySHEEHAN, D. P.Journal of nanoscience and nanotechnology (Print). 2006, Vol 6, Num 8, pp 2533-2546, issn 1533-4880, 14 p.Article

An easy-to-fabricate improved microinstrument for systematically investigating adhesion between MEMS sidewallsANSARI, N; ASHURST, W. R.Applied surface science. 2011, Vol 257, Num 24, pp 10917-10925, issn 0169-4332, 9 p.Article

Static friction in elastic adhesion contacts in MEMSTAS, N. R; GUI, C; ELWENSPOEK, M et al.Journal of adhesion science and technology. 2003, Vol 17, Num 4, pp 547-561, issn 0169-4243, 15 p.Article

Initial position estimation for closed-loop linear hybrid stepping motor drives using DC excitationSEOK, Jul-Ki; HWANG, Tai-Sik; KIM, Dong-Hun et al.IEEE transactions on magnetics. 2006, Vol 42, Num 8, pp 2071-2076, issn 0018-9464, 6 p.Article

Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structuresVORA, K. D; PEELE, A. G; SHEW, B.-Y et al.Microsystem technologies. 2007, Vol 13, Num 5-6, pp 487-493, issn 0946-7076, 7 p.Conference Paper

Silica-Encapsulated Nanoparticle Films as Surface Modifications for MEMSHURST, Kendall M; ANSARI, Naveed; ROBERTS, Christopher B et al.Journal of microelectromechanical systems. 2011, Vol 20, Num 5, pp 1065-1067, issn 1057-7157, 3 p.Article

On the use of structural vibrations to release stiction failed MEMSSAVKAR, Amit A; MURPHY, Kevin D; LESEMAN, Zayd C et al.Journal of microelectromechanical systems. 2007, Vol 16, Num 1, pp 163-173, issn 1057-7157, 11 p.Article

Integrator Leakage for Limit Cycle Suppression in Servo Mechanisms With StictionJEON, Soo.Journal of dynamic systems, measurement, and control. 2012, Vol 134, Num 3, issn 0022-0434, 034502.1-034502.8Article

Vapor-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMSYAN XIN ZHUANG; HANSEN, Ole; KNIELING, Thomas et al.Journal of microelectromechanical systems. 2007, Vol 16, Num 6, pp 1451-1460, issn 1057-7157, 10 p.Article

Adhesion characteristics of MEMS in microfluidic environmentsPARKER, Elizabeth E; ASHURST, W. Robert; CARRARO, Carlo et al.Journal of microelectromechanical systems. 2005, Vol 14, Num 5, pp 947-953, issn 1057-7157, 7 p.Article

Characterization of a MEMS tribogaugeVIJAYASAI, Ashwin; SIVAKUMAR, Ganapathy; RAMACHANDRAN, Gautham et al.Surface & coatings technology. 2013, Vol 215, pp 306-311, issn 0257-8972, 6 p.Conference Paper

Stiction in surface micromachined structuresBHATTACHARYA, Enakshi; KUANG, Jinbo; JUDY, Michael et al.SPIE proceedings series. 2002, pp 485-490, isbn 0-8194-4500-2, 2VolConference Paper

Moisture-induced ageing in granular media and the kinetics of capillary condensationBOCQUET, L; CHARLAIX, E; CILIBERTO, S et al.Nature (London). 1998, Vol 396, Num 6713, pp 735-737, issn 0028-0836Article

Theory of friction between neutral polymer brushesSOKOLOFF, J. B.Macromolecules. 2007, Vol 40, Num 11, pp 4053-4058, issn 0024-9297, 6 p.Article

Flash release: an alternative for releasing complex MEMS devicesDELADI, S; SVETOVOY, V; KRIJNEN, G. J. M et al.Journal of micromechanics and microengineering (Print). 2004, Vol 14, Num 12, pp 1659-1664, issn 0960-1317, 6 p.Article

Avoidance of stiction in the release of highly boron doped micro-actuators fabricated using BESOI substratesROSA, M. A; DIMITRIJEV, S; HARRISON, H. B et al.Microelectronics and reliability. 1999, Vol 39, Num 1, pp 139-142, issn 0026-2714Article

A fracture mechanics description of stress-wave repair in stiction-failed microcantilevers : Theory and experimentsLESEMAN, Zayd C; KOPPAKA, Sai B; MACKIN, Thomas J et al.Journal of microelectromechanical systems. 2007, Vol 16, Num 4, pp 904-911, issn 1057-7157, 8 p.Article

Improved stiction compensation in pneumatic control valvesDE SOUZA L. CUADROS, Marco Antonio; MUNARO, Celso J; MUNARETO, Saul et al.Computers & chemical engineering. 2012, Vol 38, pp 106-114, issn 0098-1354, 9 p.Article

Recommendations for the use of an atomic force microscope as an in-fab stiction monitorTHORESON, Erik J; MARTIN, J; BURNHAM, N. A et al.Journal of microelectromechanical systems. 2007, Vol 16, Num 3, pp 694-699, issn 1057-7157, 6 p.Article

A shape-analysis approach for diagnosis of stiction in control valvesHÄGGLUND, Tore.Control engineering practice. 2011, Vol 19, Num 8, pp 782-789, issn 0967-0661, 8 p.Article

Fabrication Process for Integrating Nanoparticles With Released Structures Using Photoresist Replacement of Sublimated p-Dichlorobenzene for Temporary SupportHWANG, Yongha; CANDLER, Rob N.Journal of microelectromechanical systems. 2012, Vol 21, Num 6, pp 1282-1284, issn 1057-7157, 3 p.Article