Anodic alumina as a material for MEMSDELENDIK, Kirill I; VOITIK, Olga L.SPIE proceedings series. 2001, pp 355-361, isbn 0-8194-4322-0Conference Paper

Micro-optical and opto-mechanical systems fabricated by the LIGA techniqueMOHR, J; GÖTTERT, J; MÜLLER, A et al.SPIE proceedings series. 1997, pp 273-278, isbn 0-8194-2419-6Conference Paper

Structure mechanism of MEMS security stronglink with multi-try functionSHENGYONG LI; WENYUAN CHEN; WEIPING ZHANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 6423, pp 64235A.1-64235A.7, issn 0277-786X, isbn 978-0-8194-6536-8 0-8194-6536-4, 3Conference Paper

LiGA measurement and acceptance evaluationDEARTH, B. L; STEINHOFF, R. G.Microsystem technologies. 2003, Vol 9, Num 3, pp 197-203, issn 0946-7076, 7 p.Article

LIGA tunable spectral filter performanceCOX, J. A; DOBSON, D. C; OHNSTEIN, T et al.SPIE proceedings series. 1997, pp 289-295, isbn 0-8194-2419-6Conference Paper

First automated production line for X-ray-LIGA (FELIG) is brought on lineHAHN, Lothar; SCHWARTZ, Georg; SAILE, Volker et al.Microsystem technologies. 2010, Vol 16, Num 8-9, pp 1287-1292, issn 0946-7076, 6 p.Conference Paper

Beyond siliconDEGASPARI, John.Mechanical engineering (New York, N.Y. 1919). 2005, Vol 127, Num 7, pp 30-33, issn 0025-6501, 4 p.Article

Design rules for electroforming in the LIGA processDRESE, Klaus Stefan.Journal of the Electrochemical Society. 2004, Vol 151, Num 6, pp D39-D45, issn 0013-4651Article

Development of a micro-optical distance sensorOKA, Toru; NAKAJIMA, Hajime; TSUGAI, Masahiro et al.Sensors and actuators. A, Physical. 2003, Vol 102, Num 3, pp 261-267, issn 0924-4247, 7 p.Article

Study on manufacturing technology by synchrotron radiation in NSRLZHANG, X; CHEN, D; HU, Y et al.SPIE proceedings series. 1998, pp 342-346, isbn 0-8194-3011-0Conference Paper

Development of lighting panel comprising light tube fabricated by LIGA processSAWA, Yoshitaka; TANAKA, Takanori; KITADANI, Takeshi et al.Microsystem technologies. 2008, Vol 14, Num 9-11, pp 1559-1565, issn 0946-7076, 7 p.Conference Paper

Development rate of PMMA exposed to synchrotron x-ray radiation for LIGA applicationsMCNAMARA, Shamus.Journal of micromechanics and microengineering (Print). 2011, Vol 21, Num 1, issn 0960-1317, 015002.1-015002.7Article

Manufacturing microdroplet generators with Laser-LIGA techniqueHUSNY, Joeska; JIN, Hengyi; HARVEY, Erol C et al.SPIE proceedings series. 2004, pp 100-106, isbn 0-8194-5169-X, 7 p.Conference Paper

Fabrication of three-dimensional inductor coil using excimer laser micromachiningJOLIC, K. I; GHANTASALA, M. K; HAYES, J. P et al.Journal of micromechanics and microengineering (Print). 2003, Vol 13, Num 5, pp 782-789, issn 0960-1317, 8 p.Article

Fast prototyping of high-aspect ratio, high-resolution X-ray masks by gas-assisted focused ion beamKHAN MALEK, C; HARTLEY, F. T; NEOGI, J et al.Microsystem technologies. 2003, Vol 9, Num 6-7, pp 409-412, issn 0946-7076, 4 p.Article

Electrochemistry and microsystemsEHRFELD, Wolfgang.Electrochimica acta. 2003, Vol 48, Num 20-22, pp 2857-2868, issn 0013-4686, 12 p.Conference Paper

An investigation of the effects of thickness on mechanical properties of LIGA nickel MEMS structuresLOU, J; ALLAMEH, S; BUCCHEIT, T et al.Journal of materials science. 2003, Vol 38, Num 20, pp 4129-4135, issn 0022-2461, 7 p.Conference Paper

Surface microstructuring of biocompatible bone analogue material HAPEX<^TM> using LIGA technique and embossingSCHNEIDER, Andreas; REA, Susan; HUQ, Ejaz et al.SPIE proceedings series. 2003, pp 57-64, isbn 0-8194-4976-8, 8 p.Conference Paper

Testing of a LIGA-microspectrometer for monitoring dissolved nickel concentration when etching nickel and its alloys in aqueous ferric chloride solutionsALLEN, David M; ALMOND, Heather J. A; BOUBAL, Denis et al.Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2003, pp 251-254, isbn 0-7803-7066-X, 1Vol, 4 p.Conference Paper

Design space of single-loop planar folded micro mechanisms with out-of-plane motionLUSK, Craig P; HOWELL, Larry L.Journal of mechanical design (1990). 2006, Vol 128, Num 5, pp 1092-1100, issn 1050-0472, 9 p.Article

MODULIGA: The LIGA process as a modular production method-current standardization status in GermanyHAHN, L; MEYER, P; BADE, K et al.Microsystem technologies. 2005, Vol 11, Num 4-5, pp 240-245, issn 0946-7076, 6 p.Conference Paper

Microscreen-based replication of electroforming micromoldsDOMEIER, L. A; GONZALES, M; HACHMAN, J et al.Microsystem technologies. 2002, Vol 8, Num 2-3, pp 78-82, issn 0946-7076Article

A new process to fabricate the electromagnetic stepping micromotor using LIGA process and surface sacrificial layer technologyYI, F; PENG, L; ZHANG, J et al.Microsystem technologies. 2001, Vol 7, Num 3, pp 103-106, issn 0946-7076Article

3D microfabrication technologyTANG, E; YI, F; TIAN, Y et al.SPIE proceedings series. 1998, pp 477-481, isbn 0-8194-3011-0Conference Paper

Experimental and analytical study on filling of nano structures in micro injection moldingLIN, Huang-Ya; CHANG, Ching-Ho; YOUNG, Wen-Bin et al.International communications in heat and mass transfer. 2010, Vol 37, Num 10, pp 1477-1486, issn 0735-1933, 10 p.Article