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Photoassisted electrochemical micromachining of silicon in HF electrolytesMLCAK, R; TULLER, H. L; GREIFF, P et al.Sensors and actuators. A, Physical. 1994, Vol 40, Num 1, pp 49-55, issn 0924-4247Article

SCREAM. I: Single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structuresSHAW, K. A; ZHANG, Z. L; MACDONALD, N. C et al.Sensors and actuators. A, Physical. 1994, Vol 40, Num 1, pp 63-70, issn 0924-4247Article

Applications of fluorocarbon polymers in micromechanics and micromachiningJANSEN, H. V; GARDENIERS, J. G. E; ELDERS, J et al.Sensors and actuators. A, Physical. 1994, Vol 41, Num 1-3, pp 136-140, issn 0924-4247Conference Paper

Reactive ion etching (RIE) techniques for micromachining applicationsLI, Y. X; WOLFFENBUTTEL, M. R; FRENCH, P. J et al.Sensors and actuators. A, Physical. 1994, Vol 41, Num 1-3, pp 317-323, issn 0924-4247Conference Paper

Des objets lumineux vus à la loupe = Magnified luminous objectsGAVIGNE, Louis.Annales françaises des microtechniques et de chronométrie. 2000, Vol 70, Num 49, pp 99-110, issn 0294-1228Article

Amorphous silicon carbide and its application in silicon micromachiningKLUMPP, A; SCHABER, U; OFFEREINS, H. L et al.Sensors and actuators. A, Physical. 1994, Vol 41, Num 1-3, pp 310-316, issn 0924-4247Conference Paper

Novel extra-accurate method for two-sides alignment on silicon wafersTATIC-LUCIC, S; YU-CHONG TAI.Sensors and actuators. A, Physical. 1994, Vol 42, Num 1-3, pp 573-577, issn 0924-4247Conference Paper

PSG layers for surface micromachiningPOENAR, D; FRENCH, P. J; MALLEE, R et al.Sensors and actuators. A, Physical. 1994, Vol 41, Num 1-3, pp 304-309, issn 0924-4247Conference Paper

Preparation and characterization of ultrathin crystalline silicon membranesSCHMIDT, B; BON BORANY, J; TODT, U et al.Sensors and actuators. A, Physical. 1994, Vol 42, Num 1-3, pp 689-694, issn 0924-4247Conference Paper

Development of techniques to characterize particulates emitted from gas turbine exhaustsJOHNSON, M. P; HILTON, M; WATERMAN, D. R et al.Measurement science & technology (Print). 2003, Vol 14, Num 7, pp 1146-1150, issn 0957-0233, 5 p.Article

Glass etching assisted by femtosecond pulse modificationCHIENLIU CHANG; ABE, Takashi; ESASHI, Masayoshi et al.Sensors and materials. 2003, Vol 15, Num 3, pp 137-145, issn 0914-4935, 9 p.Article

Système de mesure et contrôle de pièces sans contact : Nouvelle approche de la mesure pour l'atelier par combinaison de capteurs 2D/3D et d'une table de déplacement = Non-contact measurement system and control of pieces : New approach of measurement for workshop using a combination of 2D/3D sensors and a displacement tableDANIEL, Thierry.Photoniques (Orsay). 2002, Num 8, pp 24-27, issn 1629-4475, 4 p.Article

Anisotropic etching of silicon in hydrazineGAJDA, M. A; AHMED, H; SHAW, J. E. A et al.Sensors and actuators. A, Physical. 1994, Vol 40, Num 3, pp 227-236, issn 0924-4247Article

Infrared fibreoptic temperature monitoring during machining proceduresBELOTSERKOVSKY, E; BAR-OR, O; KATZIR, A et al.Measurement science & technology (Print). 1994, Vol 5, Num 4, pp 451-453, issn 0957-0233Article

Laser ablation deposition as a preparation method for sensor materialsLEPPÄVUORI, S; LEVOSKA, J; HILL, A. E et al.Sensors and actuators. A, Physical. 1994, Vol 41, Num 1-3, pp 145-149, issn 0924-4247Conference Paper

Reduction of heat loss of silicon membranes by the use of trench-etching techniquesWERNO, J; KERSJES, R; MOKWA, W et al.Sensors and actuators. A, Physical. 1994, Vol 42, Num 1-3, pp 578-581, issn 0924-4247Conference Paper

Characterization of the anisotropic chemical attack of (h h l) silicon plates in a TMAH 25 wt.% solution: micromachining and adequacy of the dissolution slowness surfaceTELLIER, C. R; CHARBONNIERAS, A. R.Sensors and actuators. A, Physical. 2003, Vol 105, Num 1, pp 62-75, issn 0924-4247, 14 p.Article

Manufacturing aids for cablesPRUNK, H.Wire industry. 1993, Vol 60, Num 712, pp 241-244, issn 0043-6011Conference Paper

Definition of high aspect ratio glass columnsPLAZA, J. A; LOPEZ, M. J; MORENO, A et al.Sensors and actuators. A, Physical. 2003, Vol 105, Num 3, pp 305-310, issn 0924-4247, 6 p.Article

Silicon glass anodic bonding under partial vacuum conditions: problems and solutionsBLASQUEZ, Gabriel; FAVARO, Patrick.Sensors and actuators. A, Physical. 2002, Vol 101, Num 1-2, pp 156-159, issn 0924-4247, 4 p.Article

Adhesion of microstructures investigated by atomic force microscopyTORII, A; SASAKI, M; HANE, K et al.Sensors and actuators. A, Physical. 1994, Vol 40, Num 1, pp 71-76, issn 0924-4247Article

New applications of r.f.-sputtered glass films as protection and bonding layers in silicon micromachiningBERENSCHOT, J. W; GARDENIERS, J. G. E; LAMMERINK, T. S. J et al.Sensors and actuators. A, Physical. 1994, Vol 41, Num 1-3, pp 338-343, issn 0924-4247Conference Paper

A method of calculating the cooling time of joints in thermoplastic pipes in heated tool butt welding = Méthode de calcul du temps de refroidissement des assemblages en thermoplastique soudés bout à bout par élément chauffantZAITSEV, K. I; LYASHENKO, V. F; VINDT, B. F et al.Welding Production. 1985, Vol 32, Num 11, pp 13-15, issn 0043-230XArticle

Optimising the heating process in the heated tool butt welding of plastic pipes = Optimisation du processus de chauffage pour le soudage par élément chauffant de tuyauteries en matière plastiqueKORAB, G. N; ADAMENKO, A. A; SAVITSKII, A. Z et al.Automatic Welding. 1985, Vol 38, Num 9, pp 41-43, issn 0005-108XArticle

The butt-fusion welding of PVDF and its composites. II: The reinforcement and welding of PVDF with short carbon fibresANDREWS, J. R. F; BEVIS, M.Journal of materials science. 1984, Vol 19, Num 2, pp 653-671, issn 0022-2461Article

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