Front-end processor using BBD distributed delay-sum architecture for micromachined ultrasonic sensor arrayMO, Yaowu; TANAKA, Tsunehisa; INOUE, Koji et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 4, pp 506-512, issn 1057-7157, 7 p.Article

Second-Stage Actuation for Hard Disc Drives Through MEMS TechnologyGATZEN, Hans H; FREITAS, Paulo J. P; OBERMEIER, Ernst et al.IEEE transactions on magnetics. 2010, Vol 46, Num 3, pp 782-789, issn 0018-9464, 8 p., 1Conference Paper

Controlled Thermophoresis as an Actuation Mechanism for Noncantilevered MEMS DevicesGOTSMANN, Bernd; DESPONT, Michel; DUERIG, Urs et al.Journal of microelectromechanical systems. 2008, Vol 17, Num 6, pp 1287-1293, issn 1057-7157, 7 p.Article

Materials optimization for magnetic MEMSGIBBS, Mike R. J.IEEE transactions on magnetics. 2007, Vol 43, Num 6, pp 2666-2671, issn 0018-9464, 6 p.Conference Paper

Micro-Fabricated Electromagnetic Power Generator to Scavenge Low Ambient VibrationJONG CHEOL PARK; DONG HYUN BANG; JAE YEONG PARK et al.IEEE transactions on magnetics. 2010, Vol 46, Num 6, pp 1937-1942, issn 0018-9464, 6 p.Conference Paper

Special Issue on Design, Test, Integration and Packaging of MEMS/MOEMS, 2011COURTOIS, Bernard; MICHEL, Bernd.Microsystem technologies. 2012, Vol 18, Num 11, issn 0946-7076, 185 p.Serial Issue

Fiber alignment analysis of a receiver with integrated MEMS VOACHAO WANG; HICKEY, Ryan; IRWIN, Rob et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 63521Q.1-63521Q.8, issn 0277-786X, isbn 0-8194-6447-3, 2VolConference Paper

MEMS / MOEMS technologies and applications II (Beijing, 10-12 November 2004)Zhichun Ma; Guofan Jin; Xuyuan Chen et al.SPIE proceedings series. 2004, isbn 0-8194-5596-2, XI, 364 p, isbn 0-8194-5596-2Conference Proceedings

Design, test, integration and packaging of MEMS/MOEMS 2003 (DTIP 2003)Bergman, Keren.Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2003, isbn 0-7803-7066-X, 1Vol, XI-411 p, isbn 0-7803-7066-XConference Proceedings

BioMEMS and smart nanostructures (Adelaide, 17-19 December 2001)Kish, Laszlo B; Harvey, Erol C; Spillman, William B et al.SPIE proceedings series. 2001, isbn 0-8194-4320-4, XI, 362 p, isbn 0-8194-4320-4Conference Proceedings

MEMS microdisplays : overview and marketsBOUCHIUD, Jérémie; WICHT, Henning.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 611406.1-611406.8, issn 0277-786X, isbn 0-8194-6156-3, 1VolConference Paper

MEMS components and applications for industry, automobiles, aerospace and communication II (San Jose CA, 28-29 January 2003)Janson, Siegfried W.SPIE proceedings series. 2003, isbn 0-8194-4781-1, XLIV, 248 p, isbn 0-8194-4781-1Conference Proceedings

Design, test, integration and packaging of MEMS/MOEMS 2004 (DTIP 2004)Courtois, Bernard.Symposium on Design, Test, Integration and Packaging of MWMS/MOEMS. 2004, isbn 2-84813-026-1, 1 vol (XV-490 p.), isbn 2-84813-026-1Conference Proceedings

Ambient vibration study of the Gi-Lu cable-stay bridge : Application of wireless sensing unitsLU, Kung-Chun; YANG WANG; LYNCH, J. P et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 61741D.1-61741D.11, issn 0277-786X, isbn 0-8194-6227-6Conference Paper

Analytical and experimental characterization of an optical MEMS devicePRYPUTNIEWICZ, Ryszard J; FURLONG, Cosme; PRYPUTNIEWICZ, Emily J et al.SPIE proceedings series. 2003, pp 774-779, isbn 0-8194-5189-4, 6 p.Conference Paper

Mems across the valley of deathBROWN, Alan S.Mechanical engineering (New York, N.Y. 1919). 2006, Vol 128, Num 4, pp 26-30, issn 0025-6501, 5 p.Article

MEMS / MOEMS components and their applications II (San Jose CA, 24-25 January 2005)Henning, Albert K.SPIE proceedings series. 2005, isbn 0-8194-5691-8, XLI, 242 p, isbn 0-8194-5691-8Conference Proceedings

A DC-to-32GHz 2-bit MEMS phase shifterJIANZHONG LOU; ZHENGPING ZHAO; YANG, Ruixia et al.IEEE antennas and propagation society international symposiumNational radio science meeting. 2004, pp 2867-2870, isbn 0-7803-8302-8, 4Vol, 4 p.Conference Paper

Matrix combination of mems relaysFABIAN, J. H; NIAVESH, K; KOTILAINEN, S et al.IEEE International Conference on Micro Electro Mechanical Systems. 2004, pp 861-864, isbn 0-7803-8265-X, 1Vol, 4 p.Conference Paper

Fabrication and performance testing of a steady thermocapillary pump with no moving partsDEBAR, Michael J; LIEPMANN, Dorian.Proceedings, IEEE micro electro mechanical systems. 2002, pp 109-112, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

A multi-channel micro valve for micro pneumatic artificial muscleYONG KWUN LEE; SHIMOYAMA, Isao.Proceedings, IEEE micro electro mechanical systems. 2002, pp 702-705, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

All-dielectric micromachined calorimeter for high-resolution microwave power measurementJANDER, Albrecht; MORELAND, John; KABOS, Pavel et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 635-640, issn 1084-6999, isbn 0-7803-7185-2, 6 p.Conference Paper

Heating element embedded parylene microcolumn for miniature gas chromatographNOH, Hong-Seok; HESKETH, Peter J; FRYE-MASON, Gregory C et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 73-76, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Design, fabrication and characterization of an integrated micro heat pipeMAN LEE; MAN WONG; ZOHAR, Yitshak et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 85-88, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper

Flexible microchannels with integrated nanoporous membranes for filtration and separation of molecules and particlesMETZ, Stefan; TRAUTMANN, Christina; BERTSCH, Arnaud et al.Proceedings, IEEE micro electro mechanical systems. 2002, pp 81-84, issn 1084-6999, isbn 0-7803-7185-2, 4 p.Conference Paper