A 3-D Stacked High-Q PI-Based MEMS Inductor for Wireless Power Transmission System in Bio-Implanted ApplicationsXUMING SUN; XUHUA PENG; YANG ZHENG et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 888-898, issn 1057-7157, 11 p.Article

A Polysilicon Microhemispherical Resonating GyroscopePENG SHAO; MAYBERRY, Curtis L; XIN GAO et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 762-764, issn 1057-7157, 3 p.Article

Adhesive Force Characterization for MEM Logic Relays With Sub-Micron Contacting RegionsJACK YAUNG; HUTIN, Louis; JAESEOK JEON et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 1, pp 198-203, issn 1057-7157, 6 p.Article

Delta-Sigma Control of Dielectric Charge for Contactless Capacitive MEMSGORRETA, Sergi; PONS-NIN, Joan; BLOKHINA, Elena et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 829-841, issn 1057-7157, 13 p.Article

Dynamic Properties of Angular Vertical Comb-Drive Scanning Micromirrors With Electrothermally Controlled Variable OffsetBAUER, Ralf; LI LI; UTTAMCHANDANI, Deepak et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 999-1008, issn 1057-7157, 10 p.Article

Effects of Ambient Humidity on a Micromachined Silicon Thermal Wind SensorBEI CHEN; ZHU, Yan-Qing; MING QIN et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 2, pp 253-255, issn 1057-7157, 3 p.Article

Evaluation of Mode Dependent Fluid Damping in a High Frequency Drumhead MicroresonatorSANTHOSH DORESWAMY VISHWAKARMA; ASHOK KUMAR PANDEY; PARPIA, Jeevak M et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 2, pp 334-346, issn 1057-7157, 13 p.Article

Frequency Trimming of Aluminum Nitride Microresonators Using Rapid Thermal AnnealingHENRY, Michael David; NGUYEN, Janet; YOUNG, Travis Ryan et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 3, pp 620-627, issn 1057-7157, 8 p.Article

High Voltage Output MEMS Vibration Energy Harvester in d₃₁ Mode With PZT Thin FilmLICHENG DENG; ZHIYU WEN; XINGQIANG ZHAO et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 855-861, issn 1057-7157, 7 p.Article

Improving the Sensitivity and Bandwidth of In-Plane Capacitive Microaccelerometers Using Compliant Mechanical AmplifiersKHAN, Sambuddha; ANANTHASURESH, G. K.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 871-887, issn 1057-7157, 17 p.Article

Liquid-Phase Capillary Etching of Poly(dimethylsiloxane) Microchannels With Tetra-n-Butylammonium FluorideCHANGWOO BAN; JAEWON PARK; JANG, Dong-Young et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 2, pp 276-283, issn 1057-7157, 8 p.Article

Microscale Characterization of a Mechanically Adaptive Polymer Nanocomposite With Cotton-Derived Cellulose Nanocrystals for Implantable BioMEMSHESS-DUNNING, Allison E; TYLER, Dustin J; HARRIS, James P et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 774-784, issn 1057-7157, 11 p.Article

Optical MEMS: From Micromirrors to Complex SystemsSOLGAARD, Olav; GODIL, Asif A; HOWE, Roger T et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 3, pp 517-538, issn 1057-7157, 22 p.Article

Robust MEMS Gyroscope Based on Thermal PrinciplesBAHARI, Jamal; RUI FENG; LEUNG, Albert M et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 1, pp 100-116, issn 1057-7157, 17 p.Article

Solvent Compatibility of Parylene C Film LayerKOYDEMIR, H. Ceylan; KÜLAH, H; ÖZGEN, C et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 2, pp 298-307, issn 1057-7157, 10 p.Article

Thermal Flow-Sensor Drift Reduction by Thermopile Voltage Cancellation via Power Feedback ControlDIJKSTRA, Marcel; LAMMERINK, Theo S. J; DE BOER, Meint J et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 908-917, issn 1057-7157, 10 p.Article

Thermomechanical Actuator-Based Three-Axis Optical Scanner for High-Speed Two-Photon Endomicroscope ImagingCHEN, Shih-Chi; HEEJIN CHOI; SO, Peter T. C et al.Journal of microelectromechanical systems. 2014, Vol 23, Num 3, pp 570-578, issn 1057-7157, 9 p.Article

Visual Servo Feedback Control of a Novel Large Working Range Micro Manipulation System for MicroassemblySHUNLI XIAO; YANGMIN LI.Journal of microelectromechanical systems. 2014, Vol 23, Num 1, pp 181-190, issn 1057-7157, 10 p.Article

iGC1: An Integrated Fluidic System for Gas Chromatography Including Knudsen Pump, Preconcentrator, Column, and Detector Microfabricated by a Three-Mask ProcessYUTAO QIN; GIANCHANDANI, Yogesh B.Journal of microelectromechanical systems. 2014, Vol 23, Num 4, pp 980-990, issn 1057-7157, 11 p.Article

A Microcalorimeter Integrated With Carbon Nanotube Interface Layers for Fast Detection of Trace Energetic ChemicalsWENZHOU RUAN; ZHEYAO WANG; YUANCHAO LI et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 1, pp 152-162, issn 1057-7157, 11 p.Article

A Pulsed High-Voltage Generator Utilizing a Monolithic PZT Element and Evaluation of Nonlinear Piezoelectric Behavior in Transient ModeXIN LUO; GIANCHANDANI, Yogesh B.Journal of microelectromechanical systems. 2013, Vol 22, Num 4, pp 930-937, issn 1057-7157, 8 p.Article

Complementary Dual-Contact Switch Using Soft and Hard Contact Materials for Achieving Low Contact Resistance and High Reliability SimultaneouslySONG, Yong-Ha; KIM, Min-Wu; JEONG OEN LEE et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 4, pp 846-854, issn 1057-7157, 9 p.Article

Design and Analysis of Nonuniformly Shaped Heaters for Improved MEMS-Based Electrothermal Displacement SensingFOWLER, Anthony G; BAZAEI, Ali; REZA MOHEIMANI, S. O et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 3, pp 687-694, issn 1057-7157, 8 p.Article

Dynamics of MEMS Arches of Flexible SupportsALKHARABSHEH, Sami A; YOUNIS, Mohammad I.Journal of microelectromechanical systems. 2013, Vol 22, Num 1, pp 216-224, issn 1057-7157, 9 p.Article

Electrowetting on Dielectric (EWOD)-Based Thermo-Responsive Microvalve for Interfacing Droplet Flow With Continuous FlowMOHAMMED JALAL AHAMED; BEN-MRAD, Ridha; SULLIVAN, Pierre et al.Journal of microelectromechanical systems. 2013, Vol 22, Num 3, pp 536-541, issn 1057-7157, 6 p.Article