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Lithography Asia 2009 (18-19 November 2009, Taipei, Taiwan)Chen, Alek C.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 1 vol, isbn 978-0-8194-7909-9 0-8194-7909-8Conference Proceedings

For the recuperation of the process of change for the people and with the people : Reform and revolution in South America: a forum on Bolivia and Venezuela = Pour la récupération du processus de changement, pour les gens et avec les gens : La réforme et la révolution en Amérique du Sud : un forum sur la Bolivie et le VenezuelaDialectical anthropology. 2011, Vol 35, Num 3, pp 285-293, issn 0304-4092, 9 p.Article

Analyzing Electrostatic Induced Damage Risk to Reticles with an In-situ E-Reticle SystemTU, Richard; SEBALD, Thomas.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 752015.1-752015.10Conference Paper

Dissolved gas quantification and bubble formation in liquid chemical dispenseTOM, Glenn; WEI LIU.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 752039.1-752039.9Conference Paper

PH control of water flowing in micro structure by local electrical field methodTAKANO, Akihiro; KAWAI, Akira.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 752033.1-752033.9Conference Paper

Relaxation properties of dielectric dipoles of photo resist materialsSASAZAKI, Hiroki; KAWAI, Akira.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 75202X.1-75202X.7Conference Paper

Systematic Defect Management by Design Aware InspectionCHANG, Ellis; PARK, Allen.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 75201C.1-75201C.5Conference Paper

UNIVERSITES, INSTITUTS, LABORATOIRES EN POLONAISALEK-KOWALSKI T.1973, pp 37-101Book

Micro bubble condensation in micro channel controlled by local electrical field methodOHATA, Shunsuke; KAWAI, Akira.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 752034.1-752034.11Conference Paper

Mueller matrix polarimetry for immersion lithography tools with a polarization monitoring system at the wafer planeNOMURA, Hiroshi; HIGASHIKAWA, Iwao.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 752012.1-752012.12Conference Paper

Decades of Rivalry and Complementary of Photon and Electron BeamsLIN, Bum J.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 752004.1-752004.11Conference Paper

Durability of self-standing resist sheet composed with micro holesTAKANO, Akihiro; KAWAI, Akira.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 752032.1-752032.9Conference Paper

Novel assist feature design to improve depth of focus in low kl EUV lithographyKANG, Hoyoung.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 752037.1-752037.7Conference Paper

Spontaneous deformation of resist micro pattern due to van der Waals interactionKAWAI, Akira; YAMAJI, Takashi.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 75202Y.1-75202Y.12Conference Paper

DNA sequence and comparative analysis of chimpanzee chromosome 22Nature (London). 2004, Vol 429, Num 6990, pp 382-388, issn 0028-0836, 7 p.Article

Review of State Roundabout ProgramsPOCHOWSKI, Alek; MYERS, Edward J.Transportation research record. 2010, Num 2182, pp 121-128, issn 0361-1981, 8 p.Article

Process Capability Comparison between LELE DPT and Spacer for NAND Flash 32nm and belowTSENG, Shih-En; CHEN, Alek C.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7140, issn 0277-786X, isbn 978-0-8194-7381-3 0-8194-7381-2, 714035.1-714035.11, 2Conference Paper

The general structure of edge-connectivity of a vertex subset in a graph and its incremental maintenance. Odd caseDINITZ, Yefim; VAINSHTEIN, Alek.SIAM journal on computing (Print). 2001, Vol 30, Num 3, pp 753-808, issn 0097-5397Article

Fast Converging Inverse Lithography Algorithm Incorporating Image Gradient Descent MethodsYU, Jue-Chin; PEICHEN YU.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 75200V.1-75200V.13Conference Paper

Albert Camus, précurseur (Méditerranée d'hier et d'aujourd'hui)Toumi, Alek Baylee; Bousquet, Gilles.Francophone cultures and literatures. 2009, Vol vol. 55, issn 1077-0186, isbn 978-1-433-10458-9, 1 vol (XI-161 p.), isbn 978-1-433-10458-9Conference Proceedings

Architecture description languages for high-integrity real-time systemsRADJENOVIC, Alek; PAIGE, Richard.IEEE software. 2006, Vol 23, Num 2, issn 0740-7459, 4, 71-79 [10 p.]Article

Dix ans de quotas laitiers dans les Côtes-d'ArmorTrajectoires Bretagne. 1993, Num 8, pp 5-8, issn 1167-4563Article

Back Side Photomask Haze RevisitedGRENON, Brian J; KISHKOVICH, Oleg.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 752018.1-752018.12Conference Paper

Hierarchical DPT Mask Planning For Contact LayerQIAO LI; GHOSH, Pradiptya; LACOUR, Pat et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7520, issn 0277-786X, isbn 978-0-8194-7909-9 0-8194-7909-8, 75201O.1-75201O.10Conference Paper