Solar EUV irradiance from the San Marco ASSI : a reference spectrumSCHMIDTKE, G; WOODS, T. N; WORDEN, J et al.Geophysical research letters. 1992, Vol 19, Num 21, pp 2175-2178, issn 0094-8276Article

Determination of complex index of immersion liquids at 193nmSTEHLE, Jean-Louis; PIEL, Jean-Philippe; CAMPILLO-CARRETO, Jose et al.Proceedings of SPIE, the International Society for Optical Engineering. 2006, issn 0277-786X, isbn 0-8194-6197-0, vol 3, 61544G.1-61544G.7Conference Paper

Can DUV take us below 100 nm?FINDERS, Jo; JORRITSMA, Louis; EURLINGS, Mark et al.SPIE proceedings series. 2001, pp 153-165, isbn 0-8194-4032-9, 2VolConference Paper

Spectral reflectance measurements using a precision multiple reflectometer in the UV and VUV rangeDA-KUI ZHUANG; TIAN-LI YANG.Applied optics. 1989, Vol 28, Num 23, pp 5024-5028, issn 0003-6935Article

Transmission filter for the extreme ultraviolet spectral region composed of a thin Saran (C₂H₂Cl₂) foilSEELY, J. F; SHIREY, L; KINGMAN, A et al.Applied optics. 1989, Vol 28, Num 10, pp 1818-1821, issn 0003-6935Article

A practical solution to the critical problem of 193 nm reticle hazeHALBMAIER, Dave; OHYASHIKI, Yasushi; KISHKOVICH, Oleg et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7028, pp 70282G.1-70282G.7, issn 0277-786X, isbn 978-0-8194-7243-4 0-8194-7243-3, 2Conference Paper

A short period undulator for MAXAHOLA, H; MEINANDER, T.Review of scientific instruments. 1992, Vol 63, Num 1, pp 372-375, issn 0034-6748, 2AConference Paper

Regeneration of imprint molds using vacuum ultraviolet lightNAKAO, Masashi; YAMAGUCHI, Masanori; YABU, Shintaro et al.Proceedings of SPIE, the International Society for Optical Engineering. 2011, Vol 7972, issn 0277-786X, isbn 978-0-8194-8531-1, 79722M.1-79722M.6, 2Conference Paper

NBS measurement services: radiometric standards in the vacuum ultravioletKLOSE, Jules Z; BRIDGES, J. Meruin; OTT, WILLIAM R et al.National Bureau of Standards Special Publication. 1987, issn 0083-1883, pagination mult.[136 p.], 250-3Serial Issue

Characterization of low-order aberrations in the SEMATECH Albany MET toolNAULLEAU, Patrick; WATERMAN, Justin; DEAN, Kim et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65172Q.1-65172Q.9, issn 0277-786X, isbn 978-0-8194-6636-5Conference Paper

Environmental data from the Engineering Test StandKLEBANOFF, L. E; GRUNOW, P. A; GRAHAM, S et al.SPIE proceedings series. 2002, pp 310-315, isbn 0-8194-4434-0, 2VolConference Paper

The MEEF shall inherit the earthCONLEY, Will; GARZA, Cesar; DUSA, Mircea et al.SPIE proceedings series. 2001, pp 251-258, isbn 0-8194-4032-9, 2VolConference Paper

Transient decreases of Earth's far-ultraviolet dayglowFRANK, L. A; SIGWARTH, J. B.Geophysical research letters. 1997, Vol 24, Num 19, pp 2423-2426, issn 0094-8276Article

Impact of EUV light scatter on CD control as a result of mask density changesKRAUTSCHIK, Christof; ITO, Masaaki; NISHIYAMA, Iwao et al.SPIE proceedings series. 2002, pp 289-301, isbn 0-8194-4434-0, 2VolConference Paper

A circular polarizer for the region of windowless VUV radiationDÖHRING, T; SCHÖNHENSE, G; HEINZMANN, U et al.Measurement science & technology (Print). 1992, Vol 3, Num 1, pp 91-97, issn 0957-0233Article

Ultraviolet-B (280-320 nm) radiation induced changes in photochemical activities and polypeptide components of C₃ and C₄ chloroplastsKULANDAIVELU, G; NEDUNCHEZHIAN, N; ANNAMALAINATHAN, K et al.Photosynthetica (Praha). 1991, Vol 25, Num 3, pp 333-340, issn 0300-3604Article

Far-ultraviolet astronomy on the astro-1 space shuttle missionDAVIDSEN, A. F.Science (Washington, D.C.). 1993, Vol 259, Num 5093, pp 327-334, issn 0036-8075Article

Investigation of VUV/XUV spectroscopy and stimulated radiation of clusters in noble gas beamsDOUNAN ZHUANG; SHIZHAN LEI; YONGKAI HUANG et al.Optical engineering (Bellingham. Print). 1993, Vol 32, Num 1, pp 41-45, issn 0091-3286Article

Position offset in curved-channel microchannel plate detectorsHASSLER, D. M; ROTTMAN, G. J; LAWRENCE, G. M et al.Applied optics. 1991, Vol 30, Num 25, pp 3575-3581, issn 0003-6935Article

Generation of VUV radiation by frequency tripling in Ar and Kr crystalsSCHILLING, G; ERNST, W. E; SCHWENTNER, N et al.Optics communications. 1989, Vol 70, Num 5, pp 428-432, issn 0030-4018Article

Optics ContaminationBAJT, Sasa.EUV lithography. SPIE Press Monograph. 2009, Vol 178, pp 227-259, isbn 978-0-8194-6964-9 978-0-4704-7155-5, 1Vol, 33 p.Book Chapter

Models for characterizing the printability of buried EUV defectsYUNFEI DENG; PISTOR, Tom; NEUREUTHER, Andrew R et al.SPIE proceedings series. 2001, pp 551-558, isbn 0-8194-4029-9Conference Paper

Photodissociation dynamics of allene at 157 nmHARICH, S; LEE, Y. T; YANG, X et al.PCCP. Physical chemistry chemical physics (Print). 2000, Vol 2, Num 6, pp 1187-1191, issn 1463-9076Article

Extreme ultraviolet lithography : Extreme Ultraviolet LithographySTULEN, R. H; SWEENEY, D. W.IEEE journal of quantum electronics. 1999, Vol 35, Num 5, pp 694-699, issn 0018-9197Article

Geophysical effects on magnetospheric images : Magnetospheric imagery and atmospheric remote sensingMURPHY, D. L; CHIU, Y. T.Optical engineering (Bellingham. Print). 1993, Vol 32, Num 12, pp 3147-3152, issn 0091-3286Article