Smart electronics and MEMS (San Diego CA, 4-6 March 1997)Varadan, Vijay K; McWhorter, Paul J.SPIE proceedings series. 1997, isbn 0-8194-2459-5, IX, 350 p, isbn 0-8194-2459-5Conference Proceedings

Integration of LIGA structures with CMOS circuitrySTADLER, S; AJMERA, P. K.SPIE proceedings series. 1997, pp 230-241, isbn 0-8194-2459-5Conference Paper

Microfabricated ice-detection sensorDEANNA, R. G; MEHREGANY, M; ROY, S et al.SPIE proceedings series. 1997, pp 42-51, isbn 0-8194-2459-5Conference Paper

Micromachined pressure sensors : Review and recent developmentsEATON, W. P; SMITH, J. H.SPIE proceedings series. 1997, pp 30-41, isbn 0-8194-2459-5Conference Paper

ASIC chips and their integration to smart devicesRAMALINGAM, N; VARADAN, V. K; VARADAN, V. V et al.SPIE proceedings series. 1997, pp 260-272, isbn 0-8194-2459-5Conference Paper

Integrated force array : Interface to external systemsBOBBIO, S. M; SMITH, S. W; GOODWIN-JOHANSSON, S et al.SPIE proceedings series. 1997, pp 248-259, isbn 0-8194-2459-5Conference Paper

High-performance low-cost electronics for switched-capacitance devicesGANDELLI, A; OTTOBONI, R.SPIE proceedings series. 1997, pp 114-123, isbn 0-8194-2459-5Conference Paper

Smart electronics and MEMS (San Diego CA, 2-4 March 1998)Varadan, Vijay K; McWhorter, Paul J; Singer, Richard A et al.SPIE proceedings series. 1998, isbn 0-8194-2772-1, IX, 430 p, isbn 0-8194-2772-1Conference Proceedings

IDT, SAW and MEMS sensors for measuring deflection, acceleration and ice detection of aircraftVARADAN, V. K; VARADAN, V. V; BAO, X. Q et al.SPIE proceedings series. 1997, pp 209-219, isbn 0-8194-2459-5Conference Paper

Design and development of smart skin conformal antenna with mems structural sensors and actuatorsVARADAN, V. K; VARADAN, V. V.SPIE proceedings series. 1997, pp 94-105, isbn 0-8194-2459-5Conference Paper

An overview of micromachined platforms for thermal sensing and gas detectionMANGINELL, R. P; SMITH, J. H; RICCO, A. J et al.SPIE proceedings series. 1997, pp 273-284, isbn 0-8194-2459-5Conference Paper

Micro actuator fabricated by powder particle assemblage using microprobe technologyKONNO, T; EGASHIRA, M; SHINYA, N et al.SPIE proceedings series. 1997, pp 64-69, isbn 0-8194-2459-5Conference Paper

Microstrip antennas for wireless communication in smart structures and active dampingKHORRAMI, F; DAS, N; NOURBAKHSH, S et al.SPIE proceedings series. 1997, pp 84-93, isbn 0-8194-2459-5Conference Paper

Design and implementation of digital controllers for smart structures using field programmable gate arraysKELLY, J. S; BOWMAN, H. C; RAO, V. S et al.SPIE proceedings series. 1997, pp 298-309, isbn 0-8194-2459-5Conference Paper

Fabrication of IC-compatible capacitive sensors by polymer processingPEDERSEN, M; OLTHUIS, W; BERGVELD, P et al.SPIE proceedings series. 1997, pp 70-81, isbn 0-8194-2459-5Conference Paper

Low-cost patterning and etching systems for production of microelectronic modulesJAIN, K; DUNN, T. J.SPIE proceedings series. 1997, pp 316-320, isbn 0-8194-2459-5Conference Paper

Modified low-temperature direct bonding method for vacuum microelectronics applicationJU, B.-K; LEE, D.-J; CHOI, W.-B et al.SPIE proceedings series. 1997, pp 342-348, isbn 0-8194-2459-5Conference Paper

Compact lossless synthetic network drive/controllers for active device technologiesMURRAY, J. J; KNOWLES, G. J; BOWER, B. L et al.SPIE proceedings series. 1997, pp 291-297, isbn 0-8194-2459-5Conference Paper

Direct bonding between spacer and field emitter array using an electron-beam evaporated interlayerPARK, H.-W; JU, B.-K; LEE, Y.-H et al.SPIE proceedings series. 1997, pp 328-335, isbn 0-8194-2459-5Conference Paper

The application of a plastic diaphragm for a silicon micropumpKANG, I.-B; SON, M.-T; HASKARD, M. R et al.SPIE proceedings series. 1997, pp 148-155, isbn 0-8194-2459-5Conference Paper

A TiNi shape-memory alloy actuated micropump with fluid isolationBENARD, W; KAHN, H; HUFF, M et al.SPIE proceedings series. 1997, pp 156-164, isbn 0-8194-2459-5Conference Paper

Low-cost integrated multiple-sensor electronicsMEIJER, G. C. M; VAN DER GOES, F. M. L; DE JONG, P. C et al.SPIE proceedings series. 1998, pp 246-259, isbn 0-8194-2772-1Conference Paper

MEMS sensors and wireless telemetry for distributed systemsBRITTON, C. L; WARMACK, R. J; HU, Z et al.SPIE proceedings series. 1998, pp 112-123, isbn 0-8194-2772-1Conference Paper

MEMS systems design and verification toolsMAHER, M. A; HEE JUNG LEE.SPIE proceedings series. 1998, pp 40-48, isbn 0-8194-2772-1Conference Paper

Optical microactuation in piezoceramicsTHAKOOR, S; POOSANAAS, P; MOROOKIAN, J. M et al.SPIE proceedings series. 1998, pp 376-391, isbn 0-8194-2772-1Conference Paper