Alternative smart-cut-like process for ultra-thin SOI fabricationUSENKO, Alexander; CARR, William N; BO CHEN et al.ASMC proceedings. 2002, pp 6-10, issn 1078-8743, isbn 0-7803-7158-5, 5 p.Conference Paper

Dynamic deployment modeling tool for photolithography wip managementWILLIAMS, Dennis; FAVERO, David.ASMC proceedings. 2002, pp 55-58, issn 1078-8743, isbn 0-7803-7158-5, 4 p.Conference Paper

Automated system infrastructure to facilitate Design of experiments (DOE) data analysisTANDON, Navin; BAWEJA, Gurshaman.ASMC proceedings. 2002, pp 59-63, issn 1078-8743, isbn 0-7803-7158-5, 5 p.Conference Paper

A statistical method for reducing systematic defects in the initial stages of productionNEMOTO, Kazunori; IKEDA, Shuji; YOSHIDA, Osamu et al.ASMC proceedings. 2002, pp 77-81, issn 1078-8743, isbn 0-7803-7158-5, 5 p.Conference Paper

Advanced Cu CMP defect excursion control for leading edge micro-processor manufacturingSTOECKL, Peter; SAVILLE, Barry; KAVANAGH, Jim et al.ASMC proceedings. 2002, pp 92-97, issn 1078-8743, isbn 0-7803-7158-5, 6 p.Conference Paper

HandMon-ISPM: Handling monitoring in a loading station of a furnaceTRUNK, Ralph; SCHMID, Heinz; SCHNEIDER, Claus et al.ASMC proceedings. 2002, pp 113-118, issn 1078-8743, isbn 0-7803-7158-5, 6 p.Conference Paper

A hierarchical approach to cost analysis for next generation semiconductor processesSANDELL, Raka; PIERCE, Neal G.ASMC proceedings. 2002, pp 330-335, issn 1078-8743, isbn 0-7803-7158-5, 6 p.Conference Paper

Physical removal of nano-scale defects from surfacesBUSNAINA, Ahmed A; HONG LIN.ASMC proceedings. 2002, pp 272-277, issn 1078-8743, isbn 0-7803-7158-5, 6 p.Conference Paper

Equipment productivity improvement via inline qualification implementationLAFFERTY, Neal; FIOL, Bennie; JOWETT, Paul et al.ASMC proceedings. 2002, pp 218-222, issn 1078-8743, isbn 0-7803-7158-5, 5 p.Conference Paper

Sidewall clean effect upon titanium salicide filamentsCAMPBELL, John P; BOYER, Michelle; GRIFFIN, A. J et al.ASMC proceedings. 2002, pp 368-371, issn 1078-8743, isbn 0-7803-7158-5, 4 p.Conference Paper

Spare parts Expense Management SystemYAO, David; BLOUIN, Cathy; CAVANAUGH, Mary et al.ASMC proceedings. 2002, pp 347-350, issn 1078-8743, isbn 0-7803-7158-5, 4 p.Conference Paper

Water usage reduction in a semiconductor fabricatorKLUSEWITZ, Greg; MC VEIGH, Jim.ASMC proceedings. 2002, pp 340-346, issn 1078-8743, isbn 0-7803-7158-5, 7 p.Conference Paper

Life cycle assessment of building elements from the broad perspective of planners design-considerationsDEILMANN, Clemens; GRUHLER, Karin.RILEM proceedings. 2000, pp 20-25, isbn 951-758-408-3Conference Paper

Ecological assessment of building designs existing methodologies and toolsABU SA'DEH, A. J; LUSCUERE, P. G.RILEM proceedings. 2000, pp 355-359, isbn 951-758-408-3Conference Paper

Durability prediction models for timber constructionLEICESTER, R. H; FOLIENTE, G. C.RILEM proceedings. 2000, pp 398-403, isbn 951-758-408-3Conference Paper

Corrosion models for structural designTANNER, Peter; ANDRADE, Carmen.RILEM proceedings. 2000, pp 426-430, isbn 951-758-408-3Conference Paper

Mathematical modelling of serviceability of farm buildingsKESKKÜLA, Tönu; MILJAN, Jaan.RILEM proceedings. 2000, pp 469-472, isbn 951-758-408-3Conference Paper

Durability assessment of building productsLAIR, Jérome; LE TENO, Jean-Francois; BOISSIER, Daniel et al.RILEM proceedings. 2000, pp 393-397, isbn 951-758-408-3Conference Paper

Optimization of maintenance management for existing concrete bridgesMIYAMOTO, Ayaho; KAWAMURA, Kei; NAKAMURA, Hideaki et al.RILEM proceedings. 2000, pp 108-112, isbn 951-758-408-3Conference Paper

An assessment method for environmental impact of concreteKAWAI, Kenji; TAZAWA, Ei-Ichi.RILEM proceedings. 2000, pp 334-339, isbn 951-758-408-3Conference Paper

Durability of reinforced concrete structures in Estonian agricultural buildingsMILJAN, Riina; MILJAN, Jaan; KESKKÜLA, Tönu et al.RILEM proceedings. 2000, pp 486-490, isbn 951-758-408-3Conference Paper

Procurement protocols for sustainable urban developmentSUNIKKA, Minna; HUOVILA, Pekka; CURWELL, Steve et al.RILEM proceedings. 2000, pp 31-35, isbn 951-758-408-3Conference Paper

SlabsHAJEK, Petr.RILEM proceedings. 2000, pp 534-539, isbn 951-758-408-3Conference Paper

The service life design review and performance audit approach for sustainable constructionWYATT, D. P.RILEM proceedings. 2000, pp 74-79, isbn 951-758-408-3Conference Paper

ASMC 2002 : advancing the science and technology of semiconductor manufacturing (Boston MA, 30 April - 2 May 2002)ASMC proceedings. 2002, issn 1078-8743, isbn 0-7803-7158-5, V, 430 p, isbn 0-7803-7158-5Conference Proceedings