Microstructural properties of thermally stable Ti/W/Au ohmic contacts on n-type GaN
- Auteur
- RAMESHA REDDY, N1 ; RAJAGOPAL REDDY, V1 ; CHOI, Chel-Jong2
[1] Department of Electronics, University of Mysore, Post-Graduate Centre, Hemagangotri, 573 220 Hassan, India
[2] Future Technology Research Division, Electronics and Telecommunications Research Institute (ETRI), Daejon 305-350, Korea, Republic of - Source
Microelectronic engineering. 2006, Vol 83, Num 10, pp 1981-1985, 5 p ; ref : 15 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Domaine scientifique
- Electronics
- Editeur
- Elsevier Science, Amsterdam
- Pays de publication
- Netherlands
- Type de document
- Article
- Langue
- English
- Mot clé auteur
- Auger electron microscopy Microstructural Ohmic contacts Transmission electron microscopy
- Mot clé (fr)
- Caractéristique électrique Contact ohmique Contact thermique Lacune Microscopie Auger Microscopie électronique transmission Microscopie électronique Microstructure Recuit Résistance contact Semiconducteur type n Spectrométrie Auger
- Mot clé (en)
- Electrical characteristic Ohmic contact Thermal contact Vacancy Auger microscopy Transmission electron microscopy Electron microscopy Microstructure Annealing Contact resistance n type semiconductor Auger electron spectrometry
- Mot clé (es)
- Característica eléctrica Contacto óhmico Contacto térmico Cavidad Microscopía Auger Microscopía electrónica transmisión Microscopía electrónica Microestructura Recocido Resistencia contacto Semiconductor tipo n Espectrometría Auger
- Classification
- Pascal
- 001 Sciences exactes et technologie / 001D Sciences appliquees / 001D03 Electronique / 001D03F Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide / 001D03F01 Interfaces
- Discipline
- Electronics
- Provenance
- Inist-CNRS
- Base de données
- PASCAL
- Identifiant INIST
- 17891469
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mee.2006.02.019 
https://dx.doi.org/10.1016/j.mee.2006.02.019
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