A simple technique for defining the structure and the dimensional parameters of layered specimens
- Auteur
- DREOMOVA, N1
[1] RD&P Center ORION/ State Scientific Center, Moscow, Russian Federation - Titre de la conférence
- Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics (25-27 May 2005, Moscow, Russia)
- Nom de la conférence
- All-Russian Seminar on Problems of Theoretical and Applied Electron and Ion Optics (7 ; Moscow 2005)
- Auteur (monographie)
- Filachev, Anatoly M (Editor); Gaidoukova, Inna S (Editor)
Russia, Federal Agency on Industry, Russian Federation (Organiser of meeting)
Rossiĭskaia akademiia nauk, Russian Federation (Organiser of meeting)
Society of Photo-optical Instrumentation Engineers, United States (Organiser of meeting)
Society of Photo-optical Instrumentation Engineers, Russian Chapter, Russian Federation (Organiser of meeting)
State Scientific Center of the Russian Federation RD&P Center ORION, Russian Federation (Organiser of meeting) - Source
Proceedings of SPIE, the International Society for Optical Engineering. 2006 ; 1Vol, pp 62780P.1-62780P.4 ; ref : 4 ref
- CODEN
- PSISDG
- ISSN
- 0277-786X
- ISBN
- 0-8194-6348-5
- Domaine scientifique
- Electronics; Optics; Physics
- Editeur
- SPIE, Bellingham WA
- Pays de publication
- United States
- Type de document
- Conference Paper
- Langue
- Russian
- Mot clé (fr)
- Microscopie électronique balayage Optique ionique Optique électronique Rayon X 4185
- Mot clé (en)
- Scanning electron microscopy Ion optics Electron optics X radiation
- Classification
- Pascal
- 001 Sciences exactes et technologie / 001B Physique / 001B40 Domaines classiques de la physique (y compris les applications) / 001B40A Electromagnétisme; optique électronique et ionique / 001B40A85 Optique des faisceaux
- Discipline
- Physics : electromagnetism
- Provenance
- Inist-CNRS
- Base de données
- PASCAL
- Identifiant INIST
- 18360136
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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