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A novel design of grating projection system for 3D reconstruction of wafer bumps

Author
YUAN SHU1 ; RONALD CHUNG2 ; ZHENG TAN1 ; JUN CHENG2 ; LAM, Edmund Y3 ; FUNG, Kenneth S. M4 ; FAN WANG4
[1] School of Electron & Info. Engr., Xi'an Jiaotong Univ, Shannxi, China
[2] Dept. of ACAE, The Chinese University of Hong Kong, Hong-Kong
[3] Dept. of EEE, The University of Hong Kong, Hong-Kong
[4] ASM Assembly Automation Ltd, Hong-Kong
Conference title
Three-dimensional image capture and applications VII (16-17 January 2006, San Jose, California, USA)
Conference name
Three-dimensional image capture and applications (7 ; 2006)
Author (monograph)
Corner, Brian D (Editor); Li, Peng (Editor); Tocheri, Matthew (Editor)
IS&T-The Society for Imaging Science and Technology, United States (Organiser of meeting)
Society of photo-optical instrumentation engineers, United States (Organiser of meeting)
Source

Proceedings of SPIE, the International Society for Optical Engineering. 2006, pp 605601.1-605601.10 ; ref : 10 ref

CODEN
PSISDG
ISSN
0277-786X
ISBN
0-8194-6096-6
Scientific domain
Electronics; Optics; Physics; Telecommunications
Publisher
SPIE, Bellingham (Wash.)
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Aberration optique Fonction transfert modulation Grande vitesse Image tridimensionnelle Lentille sphérique 4215F 4230L
Keyword (en)
Optical aberration Modulation transfer function High speed Tridimensional image Spherical lens
Keyword (es)
Aberración óptica Función transferencia modulación Gran velocidad Imagen tridimensional Lente esférico
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B15 Geometrical optics / 001B40B15F Aberrations

Pascal
001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B30 Imaging and optical processing / 001B40B30L Modulation and optical transfer functions

Discipline
Physics : optics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
18971740

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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