The electrical conduction and dielectric strength of SU-8
- Auteur
- MELAI, Joost1 ; SALM, Cora1 ; SMITS, Sander1 ; VISSCHERS, Jan2 ; SCHMITZ, Jurriaan1
[1] Semiconductor Components, MESA+ Institute, University of Twente, Enschede, Netherlands
[2] NIKHEF, Amsterdam, Netherlands - Source
Journal of micromechanics and microengineering (Print). 2009, Vol 19, Num 6 ; 065012.1-065012.7 ; ref : 19 ref
- ISSN
- 0960-1317
- Domaine scientifique
- Electronics; Mechanical engineering
- Editeur
- Institute of Physics, Bristol
- Pays de publication
- United Kingdom
- Type de document
- Article
- Langue
- English
- Mot clé (fr)
- Conduction électrique Courant fuite Diélectrique Emission thermoionique Epaisseur couche Epoxyde résine Haute tension Photorésist Résistance matériau Section variable
- Mot clé (en)
- Electrical conduction Leakage current Dielectric materials Thermionic emission Layer thickness Epoxy resin High voltage Photoresist Strength of materials Variable section
- Mot clé (es)
- Conductor eléctrico Corriente escape Dieléctrico Emisión termoiónica Espesor capa Epóxido resina Alta tensión Fotorresistencia Resistencia material Sección variable
- Classification
- Pascal
- 001 Sciences exactes et technologie / 001B Physique / 001B00 Generalites / 001B00G Instruments, appareillage, composants et techniques communs à plusieurs branches de la physique et de l'astronomie / 001B00G10 Techniques, équipements et instruments mécaniques / 001B00G10C Systèmes et dispositifs micromécaniques
- Pascal
- 001 Sciences exactes et technologie / 001D Sciences appliquees / 001D03 Electronique / 001D03F Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide / 001D03F17 Fabrication microélectronique (technologie des matériaux et des surfaces)
- Pascal
- 001 Sciences exactes et technologie / 001D Sciences appliquees / 001D12 Genie mecanique. Construction mecanique / 001D12I Mécanique de précision. Horlogerie
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Provenance
- Inist-CNRS
- Base de données
- PASCAL
- Identifiant INIST
- 21616074
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/19/6/065012 
https://dx.doi.org/10.1088/0960-1317/19/6/065012
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