Influence of oxygen and argon flow on properties of aluminum-doped zinc oxide thin films prepared by magnetron sputtering
- Auteur
- HUA ZHU1 ; HEMEI WANG1 ; WENQIONG WAN2 ; SHIJIN YU1 ; XIAOWEI FENG2
[1] Department of Mechanical and Electrical Engineering, Jingdezhen Ceramic Institute, Jingdezhen, Jiangxi 333001, China
[2] Technology and Arts of Jingdezhen Ceramic Institute, Jingdezhen, Jiangxi 333001, China - Source
Thin solid films. 2014, Vol 566, pp 32-37, 6 p ; ref : 32 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Domaine scientifique
- Crystallography; Metallurgy, welding; Condensed state physics
- Editeur
- Elsevier, Amsterdam
- Pays de publication
- Netherlands
- Type de document
- Article
- Langue
- English
- Mot clé auteur
- Aluminum-doped zinc oxide Magnetron sputtering Oxygen/argon flow ratio Resistivity Transmittance X-ray diffraction
- Mot clé (fr)
- Addition zinc Bande interdite Conductivité électrique Couche mince Densité porteur charge Diffraction RX Dépôt physique phase vapeur Dépôt pulvérisation Epaisseur couche Facteur transmission Grosseur grain Microstructure Mobilité Hall Nanomatériau Pulvérisation cathodique Structure surface 6855J 7361 8107 8115C Al2O3 Substrat aluminium
- Mot clé (en)
- Zinc additions Energy gap Electrical conductivity Thin films Carrier density XRD Physical vapor deposition Sputter deposition Layer thickness Transmittance Grain size Microstructure Hall mobility Nanostructured materials Cathode sputtering Surface structure
- Mot clé (es)
- Espesor capa Factor transmisión
- Classification
- Pascal
- 001 Sciences exactes et technologie / 001B Physique / 001B60 Etat condense: structure, proprietes mecaniques et thermiques / 001B60A Structure des liquides et des solides; cristallographie / 001B60A16 Microscopies électronique, ionique et en champ proche
- Pascal
- 001 Sciences exactes et technologie / 001B Physique / 001B60 Etat condense: structure, proprietes mecaniques et thermiques / 001B60H Surfaces et interfaces; couches minces et trichites (structure et propriétés non électroniques) / 001B60H55 Structure et morphologie de couches minces / 001B60H55J Structure et morphologie; épaisseur
- Pascal
- 001 Sciences exactes et technologie / 001B Physique / 001B80 Domaines interdisciplinaires: science des materiaux; rheologie / 001B80A Science des matériaux / 001B80A07 Nanomatériaux et nanostructures : fabrication et caractèrisation / 001B80A07Z Divers
- Pascal
- 001 Sciences exactes et technologie / 001B Physique / 001B80 Domaines interdisciplinaires: science des materiaux; rheologie / 001B80A Science des matériaux / 001B80A15 Méthodes de dépôt de films et de revêtements; croissance de films et épitaxie / 001B80A15C Depôt par pulvérisation cathodique
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Provenance
- Inist-CNRS
- Base de données
- PASCAL
- Identifiant INIST
- 28733524
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2014.07.021 
https://dx.doi.org/10.1016/j.tsf.2014.07.021
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