Characteristics of Hall accelerator for helium-ion beam extraction
- Auteur
- OKADA, M1 ; TOKU, H; YAMAMOTO, Y; YOSHIKAWA, K
[1] Nippon Steel Corp., Advanced Materials & Technology Research Laboratories, Nakahara-ku, Kawasaki 211, Japan - Source
Japanese journal of applied physics. 1993, Vol 32, Num 10, pp 4826-4837 ; 1 ; ref : 22 ref
- CODEN
- JJAPA5
- ISSN
- 0021-4922
- Domaine scientifique
- Crystallography; Optics; Condensed state physics; Physics; Plasma physics
- Editeur
- Japanese journal of applied physics, Tokyo
- Pays de publication
- Japan
- Type de document
- Article
- Langue
- English
- Mot clé (fr)
- Accélérateur Couche mince Dépôt Etude expérimentale Etude théorique Extraction faisceau Hélium ion Revêtement Source ion
- Mot clé (en)
- Accelerators Thin films Deposition Experimental study Theoretical study Beam extraction Helium ions Coatings Ion sources
- Classification
- Pascal
- 001 Sciences exactes et technologie / 001B Physique / 001B20 Physique nucleaire / 001B20I Méthodes expérimentales et appareillage pour les particules élémentaires et la physique nucléaire / 001B20I25 Sources de particules et cibles / 001B20I25N Sources d'ions: positifs et négatifs
- Pascal
- 001 Sciences exactes et technologie / 001B Physique / 001B80 Domaines interdisciplinaires: science des materiaux; rheologie / 001B80A Science des matériaux / 001B80A15 Méthodes de dépôt de films et de revêtements; croissance de films et épitaxie
- Pacs
- 2925N
- Pacs
- 8115
- Discipline
- Nuclear physics Physics and materials science
- Provenance
- Inist-CNRS
- Base de données
- PASCAL
- Identifiant INIST
- 3878723
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1143/JJAP.32.4826 
https://dx.doi.org/10.1143/JJAP.32.4826
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