Vacuum arc ion sources for particle accelerators and ion implantation : Discharges and electrical insulation in vacuum
- Auteur
- BROWN, I. G
Univ. California, Lawrence Berkeley lab., Berkeley CA 94720, United States - Nom de la conférence
- ISDEIV. International symposium (15 ; Darmstadt 1992-09-06)
- Source
IEEE transactions on plasma science. 1993, Vol 21, Num 5, pp 537-546 ; ref : 78 ref
- CODEN
- ITPSBD
- ISSN
- 0093-3813
- Domaine scientifique
- Nuclear physics; Plasma physics
- Editeur
- Institute of Electrical and Electronics Engineers, New York, NY
- Pays de publication
- United States
- Type de document
- Conference Paper
- Langue
- English
- Mot clé (fr)
- Accélérateur ion lourd Appareillage Arc électrique Etude expérimentale Implantation ion Métal Source ion Système vide
- Mot clé (en)
- Heavy ion accelerators Instrumentation Electric arcs Experimental study Ion implantation Metals Ion sources Vacuum systems
- Classification
- Pascal
- 001 Sciences exactes et technologie / 001B Physique / 001B20 Physique nucleaire / 001B20I Méthodes expérimentales et appareillage pour les particules élémentaires et la physique nucléaire / 001B20I20 Accélérateurs circulaires et anneaux de stockage
- Pascal
- 001 Sciences exactes et technologie / 001B Physique / 001B20 Physique nucleaire / 001B20I Méthodes expérimentales et appareillage pour les particules élémentaires et la physique nucléaire / 001B20I25 Sources de particules et cibles / 001B20I25N Sources d'ions: positifs et négatifs
- Pascal
- 001 Sciences exactes et technologie / 001B Physique / 001B60 Etat condense: structure, proprietes mecaniques et thermiques / 001B60A Structure des liquides et des solides; cristallographie / 001B60A72 Défauts et impuretés dans les cristaux; microstructure
- Pacs
- 2920
- Pacs
- 2925N
- Discipline
- Nuclear physics Physics of condensed state : structure, mechanical and thermal properties
- Provenance
- Inist-CNRS
- Base de données
- PASCAL
- Identifiant INIST
- 3894202
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/27.249640 
https://dx.doi.org/10.1109/27.249640
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