The preparation of InSb and InAs1-xSbx by metalorganic chemical vapor deposition
- Auteur
- BIEFELD, R. M
Sandia National Laboratories - Source
Journal of crystal growth. 1986, Vol 75, Num 2, pp 255-263 ; ref : 26 ref
- CODEN
- JCRGAE
- ISSN
- 0022-0248
- Domaine scientifique
- Crystallography; Geology; Metallurgy, welding
- Editeur
- Elsevier, Amsterdam
- Pays de publication
- Netherlands
- Type de document
- Article
- Langue
- English
- Mot clé (fr)
- Cinétique Composition chimique Composé minéral Composé organométallique Couche mince Croissance cristalline Dépôt chimique phase vapeur Epitaxie Etude expérimentale Indium Antimoniure Indium Arsénioantimoniure Modèle thermodynamique Solution solide
- Mot clé (en)
- Kinetics Chemical composition Inorganic compound Organometallic compound Thin film Crystal growth Chemical vapor deposition Epitaxy Experimental study Indium Antimonides Indium Antimonides arsenides Thermodynamic model Solid solution
- Mot clé (es)
- Cinetica Composicion quimica Compuesto mineral Capa delgada Estudio experimental
- Classification
- Pascal
- 001 Sciences exactes et technologie / 001B Physique / 001B80 Domaines interdisciplinaires: science des materiaux; rheologie / 001B80A Science des matériaux / 001B80A15 Méthodes de dépôt de films et de revêtements; croissance de films et épitaxie / 001B80A15G Dépôt chimique en phase vapeur (incluant le cvd activé par plasma, mocvd, etc.)
- Discipline
- Physics and materials science
- Provenance
- Inist-CNRS
- Base de données
- PASCAL
- Identifiant INIST
- 8745604
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0022-0248(86)90035-7 
https://dx.doi.org/10.1016/0022-0248(86)90035-7
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