Inert gas cutting of titanium sheet with pulsed mode CO₂ laserTIRUMALA RAO, B; KAUL, Rakesh; TIWARI, Pragya et al.Optics and lasers in engineering. 2005, Vol 43, Num 12, pp 1330-1348, issn 0143-8166, 19 p.Article

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Wave-shift and its effect on surface quality in super-abrasive grindingTRMAL, G. J; HOLESOVSKY, F.International journal of machine tools & manufacture. 2001, Vol 41, Num 7, pp 979-989, issn 0890-6955Article

Compensating methods of corner undercutting in silicon micromachiningMAO, G; YAO, S; QU, H et al.SPIE proceedings series. 1997, pp 325-331, isbn 0-8194-2656-3Conference Paper

Etching technology for chromatography microchannelsTJERKSTRA, R. W; DE BOER, M; BERENSCHOT, E et al.Electrochimica acta. 1997, Vol 42, Num 20-22, pp 3399-3406, issn 0013-4686Conference Paper

Excimer laser : a new tool for precision micromachiningENDERT, H; PÄTZEL, R; BASTING, D et al.Optical and quantum electronics. 1995, Vol 27, Num 12, pp 1319-1335, issn 0306-8919Article

A fully suspended, movable, single-crystal silicon, deep submicron MOSFET for nanoelectromechanical applicationsYAO, J. J; ARNEY, S. C; MACDONALD, N. C et al.Sensors and actuators. A, Physical. 1994, Vol 40, Num 1, pp 77-84, issn 0924-4247Article

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Plasma in photon matter interaction during laser material processingFABBRO, R; POUEYO, A.Journal de physique. IV. 1994, Vol 4, Num 4, pp C4.3-C4.8, issn 1155-4339Conference Paper

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Design and fabrication of a microlens array by use of a slow tool servoYI, A. Y; LI, L.Optics letters. 2005, Vol 30, Num 13, pp 1707-1709, issn 0146-9592, 3 p.Article

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Measurement of relative tool displacement to the workpiece for the assessment of influences of machining errors on surface profilesBORYCZKO, A.Measurement. 2002, Vol 31, Num 2, pp 93-105, issn 0263-2241Article

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